Design and Development of Stepper Motor Based XY Scanning Stage

Abstract

Precision planar motion (XY) stages are widely used in semiconductor manufacturing systems, precision machine tools, and scanning probe measurement systems. This research presents a design, modeling, manufacturing and system interfacing of Stepper Motor based XY Scanning Stage for precision application. Serially mounted XY stage is initially modeled using modeling software CATIA V5 and further analysis is carried out in ANSYS 14. Once design was within acceptable limit it is further taken for manufacturing and entire XY stage is manufactured. Mounting