Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization

Abstract

Micro-electromechanical systems (MEMS) gyroscope has important applications in many fields such as aviation, spaceflight, weaponry and automatic driving. To improve the robustness and sensitivity, we design a novel dual-mass MEMS gyroscope based on the mode localization in this paper. The gyroscope structure consists of a pair of perturbation systems connected with weakly coupled resonator systems (WCRS). It has the advantage of eliminating the mode matching and achieving the mode localization effect. The dynamic behaviors of MEMS gyroscope are developed by the multi-scale method. The detection characteristics of amplitude ratio (AR) and amplitude difference (AD) are compared. Combining numerical simulation, we analyzed the influence of critical parameter. It is indicated that the sensitivity can reach up to 56199.78 ppm/°/s through AR output, which is two magnitudes higher than the traditional MEMS gyroscope. For the detection of micro-angular rate, the AD output has advantages in sensitivity, and AR output has a smaller nonlinearity error. In addition, structural parameters, especially the voltage of perturbation parallel plate, have a significant impact on system sensitivity. If the breakdown voltage meets condition, the sensitivity can be enhanced more than ten times by amplifying the voltage, which further broaden the application field of the MEMS gyroscope.