Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator

Wen, Fuhliang; Yen, Chih-Ying

doi:10.1016/j.ultras.2007.06.005

Cited by 10 publications

(9 citation statements)

References 8 publications

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“…This paper describes the 4-9-9-14 piezoelectric actuator functioning as a driving device and explains how to design a biaxial piezoelectric actuated stage [14]. A biaxial piezoelectric actuated stage designed by a precise positioning experiment is described hereunder.…”

Section: Biaxial Piezoelectric Actuated Stagementioning

confidence: 99%

Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

Mou

2014

Advances in Mechanical Engineering

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In this paper, a novel thin-disc piezoelectric actuator, 4-9-9-14 piezoelectric actuator, is used to construct and drive the micro/nanometer level biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement signals of the piezoelectric actuated stage are read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear optical scale. The new consideration of tuning on time is used in place of the traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. A combined driving signal is based on the sum of a continuous driving signal for on time and a DC signal for off time; the combined driving signal is continuously output in this manner to form a continuous driving pulse chain. Under a constant driving voltage, the displacement of the stage increases with on time and the displacement of the stage decreases with on time.

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Section: Biaxial Piezoelectric Actuated Stagementioning

confidence: 99%

Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

Mou

2014

Advances in Mechanical Engineering

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“…According to the previous works [7][8][9], three constraints become the necessary condition to satisfy the stable ultrasonic actuating mechanism for a thin-disc actuator with in-plane vibration modes, but there is a lack of tuning function. Therefore, the fourth or more constraints are needed to fulfill the tuning mechanism.…”

Section: Theorical Estimation Of In-plane Wave Propagation With Innermentioning

confidence: 99%

“…Now, the Eqs. (3), (4), (6), (7) and (8)(9)(10)(11) are substituted into the Eqs. 5(a) and 5(b), as well as the known MN-1 pairs of in-plane degenerated wave modes are chosen.…”

Section: Theorical Estimation Of In-plane Wave Propagation With Innermentioning

confidence: 99%

“…It is more expensive to build the ultrasonic motor and to supply the higher driving voltage for actuating the bulk piezoelectric material. Some investigation or designs were proposed by using disc-shaped ultrasonic actuators with various constraints [4][5][6][7][8][9][10]. Generally speaking, the disc-shaped vibration modes are classified into in-plane modes or out-of-plane modes.…”

Section: Introductionmentioning

confidence: 99%

“…To push the linear slider in synthetic elliptical displacement, however, the driving voltage at free loading needed up to or grater than 40 V pp . Several previous works relative to the ultrasonic motor or actuator in-volved three constraints on a thin-disc vibrator to generate an in-plane moving displacements [7][8][9]. This kind of mode shapes on a thin-disc actuator belongs to modified modes but there is a lack of equilibrium output force in bilateral directions for actuating a rotor or a slider.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Theoretical Estimation and Modeling for Constraint-Tuning Ultrasonic Actuator

2012

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Using a piezoelectric unimorph vibrator with constraint-tuning modified-mode (CTMM) mechanism, a novel design of a thin-disc ultrasonic actuator was developed to drive an optical sled. The theoretical estimation of in-plane wave propagation on a thin disc is introduced to explain the novel actuating mechanism, via a modal expansion technique and modal participation factors. Furthermore, the approximate wave propagations could be illustrated by the practical estimated wave equations in this study. Applying four screws at the exact distribution of angles on the thin-disc vibrator, the actuating mechanism of ultrasonic modified modes is generated and propagated. The in-plane vibration modes could be tuned by these desired screw constraints on the piezoelectric vibrator. The ultrasonic actuator offers the output force to drive an optical sled by friction contact in bilateral motions. To implement the equilibrium structure force in bilateral directions, natural and forced analysis as well as impedance comparison of FEM software ANSYS are also introduced into the constrained design. Hence, there are two various modified modes chosen at the different resonant frequencies within the electromechanical coupling of piezoelectric material to pursue more efficiency in energy conversion. Experimental results have demonstrated consistency with the approximate theoretical approach of the in-plane wave propagation and simulations based on the concept of constrained-tuning modified modes.

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A low-speed linear stage based on vibration trajectory control of a bending hybrid piezoelectric ultrasonic motor

Tian

Shen

et al. 2019

Mechanical Systems and Signal Processing

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Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator

Cited by 10 publications

References 8 publications

Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator

Theoretical Estimation and Modeling for Constraint-Tuning Ultrasonic Actuator

A low-speed linear stage based on vibration trajectory control of a bending hybrid piezoelectric ultrasonic motor

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