Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors

Hake, Alison; Zhao, Chuming; Sung, Wang-Kyung; Grosh, Karl

doi:10.1109/jsen.2021.3085825

Cited by 14 publications

(9 citation statements)

References 29 publications

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“…With a tailored design strategy for other influential factors shown in Eq. (7), it is possible for polymeric piezoelectric MEMS accelerometers to achieve key performance metrics rivaling their PZT-based counterparts by using thick PVDF films.…”

Section: Theoretical Feasibilitymentioning

confidence: 99%

“…Lead-free high-performance alternatives such as potassium sodium niobate (KNN) present sustainability-related issues during raw material excavation 11 , 12 . Even though more environmentally friendly materials such as aluminum nitrides (AlN) 5 , 7 , 15 , 16 and zinc oxide (ZnO) 6 , 13 , 14 , 17 can be used for piezoelectric MEMS transducers, they cannot provide device performance comparable with PZT-based MEMS transducers due to weaker piezoelectric properties. Moreover, all these inorganic materials, regardless of their piezoelectric properties and environmental impacts, are used in MEMS fabrication flow based on similar methodologies.…”

Section: Introductionmentioning

confidence: 99%

“…They rank second in usage among MEMS devices, with only pressure sensors being more commonly used 1 . While traditionally used for vibration monitoring 2 , automotive testing 2,3 , and inertial navigation 3,4 , recent research highlights the potential of MEMS accelerometers in health monitoring devices and implantable hearing aids [4][5][6][7] . Early MEMS accelerometers used piezoresistive coupling in silicon.…”

Section: Introductionmentioning

confidence: 99%

“…Piezoelectric MEMS accelerometers have therefore become popular of late. They provide many advantages over piezoresistive and capacitive couplings, such as higher temperature stability, higher robustness, reduced power consumption, better linear characteristics, wider dynamic range, enhanced sensitivity, and no vacuum sealing requirement [1][2][3][4][5][6][7][8][9][10] . Additionally, when used for implantable hearing aids, piezoelectric accelerometers have the potential to directly interface with neurons, eliminating the need for extra readout circuits [5][6][7] .…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring. Polymer piezoelectric MEMS accelerometers offer the merits of heavy-metal-free structure material and simple microfabrication flow. More importantly, polymeric piezoelectric MEMS accelerometers may be the basis of novel applications, such as fully organic inertial sensing microsystems using polymer sensors and organic integrated circuits. This paper presents a novel polymer piezoelectric MEMS accelerometer design using PVDF films. A simple and rapid microfabrication flow based on laser micromachining of thin films and 3D stereolithography was developed to fabricate three samples of this design. During proof-of-concept experiments, the design achieved a sensitivity of 21.82 pC/g (equivalent open-circuit voltage sensitivity: 126.32 mV/g), a 5% flat band of 58.5 Hz, and a noise density of 6.02 µg/√Hz. Thus, this design rivals state-of-the-art PZT-based counterparts in charge sensitivity and noise density, and it surpasses the performance capabilities of several commercial MEMS accelerometers. Moreover, this design has a 10-times smaller device area and a 4-times larger flat band than previous state-of-the-art organic piezoelectric MEMS accelerometers. These experimentally validated performance metrics demonstrate the promising application potential of the polymeric piezoelectric MEMS accelerometer design presented in this article.

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Section: Theoretical Feasibilitymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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“…Single channel piezoelectric vibration sensor for cochlear implants has been designed by Hake et al, and they concluded that single channel system could not achieve minimum detectable signal levels. [ 10 ] Even if the signal level is improved, a single channel system will require an additional filtering system, which increases the power consumption of the interface electronics. Udvardi et al presented a 16‐channel spiral‐shaped AlN piezoelectric cantilever array system for middle ear implantation.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

Yüksel,

Atik,

Külah

2024

Advanced Science

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This paper presents an acoustic transducer for fully implantable cochlear implants (FICIs), which can be implanted on the hearing chain to detect and filter the ambient sound in eight frequency bands between 250 and 6000 Hz. The transducer dimensions are conventional surgery compatible. The structure is formed with 3 × 3 × 0.36 mm active space for each layer and 5.2 mg total active mass excluding packaging. Characterization of the transducer is carried on an artificial membrane whose vibration characteristic is similar to the umbo vibration. On the artificial membrane, piezoelectric transducer generates up to 320.3 mVpp under 100 dB sound pressure level (SPL) excitation and covers the audible acoustic frequency. The measured signal‐to‐noise‐ratio (SNR) of the channels is up to 84.2 dB. Sound quality of the transducer for fully implantable cochlear implant application is graded with an objective qualification method (PESQ) for the first time in the literature to the best of the knowledge, and scored 3.42/4.5.

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An Implantable Piezofilm Middle Ear Microphone: Performance in Human Cadaveric Temporal Bones

Zhang,

Graf,

Banerjee

et al. 2024

JARO

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Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors

Cited by 14 publications

References 29 publications

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Piezoelectric Multi‐Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration

An Implantable Piezofilm Middle Ear Microphone: Performance in Human Cadaveric Temporal Bones

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