INTERMAG 2006 - IEEE International Magnetics Conference 2006
DOI: 10.1109/intmag.2006.375774
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Design and Experimental Validation of Performance for a Maglev Moving-Magnet-Type Synchronous PM Planar Motor

Abstract: IntroductionAmong the planar actuators, the SPMPM has the advantages such as no heating problem, high power conversion ratio, and so on. However, conventional moving-coil type SPMPMs are shown to have the limits to expend their working range since they have power cables in the mover. In addition, x-and ydirection motions are coupled each other [1]. In this paper, we propose a novel Maglev moving-magnet-type SPMPM that has a simple and thin stator composed of several PCBs. In order to study the feasibility of t… Show more

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Cited by 3 publications
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“…The relationships between THD and τ can be calculated by (5) and (6). Figure 5 shows their relationships in x-(y-) direction and in z-direction.…”
Section: Sinusoidal Index Verificationmentioning
confidence: 99%
See 1 more Smart Citation
“…The relationships between THD and τ can be calculated by (5) and (6). Figure 5 shows their relationships in x-(y-) direction and in z-direction.…”
Section: Sinusoidal Index Verificationmentioning
confidence: 99%
“…Usually permanent-magnet synchronous planar motors have either moving magnets and stationary coils, or moving coils and stationary magnets. The mover of planar motor is controlled in six degrees of freedom and magnetically levitated by the Lorentz force generated between the mover and stator [6].…”
Section: Introductionmentioning
confidence: 99%
“…The H∞ control method was applied to the maglev system [16], and the system robustness on the change of air gap or the mass of suspension electromagnet was improved, however, its problem was the higher order of controller. Linear state feedback control was used widely in most suspension controls, and a large number of works adopted Taylor series expansion to linearize the system model at the equilibrium position, which could result in the poor robustness performance due to ignoring the higher order terms [17,18]. In [19], an adaptive control approach was employed to the maglev bearing.…”
Section: Introductionmentioning
confidence: 99%
“…It can also work in a vacuum environment, which can meet the requirement of next-generation ultraviolet lithography technology [5,6]. Thus, it has caught the attention of many researchers in the field of high-accuracy planar directly-driven lithography [7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%