Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE
DOI: 10.1109/imnc.2001.984161
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Design and fabrication of 1D and 2D micro scanners actuated by double layered PZT bimorph beams

Jiunnjye Tsaur
1
,
Lulu Zhang2,
Ryutaro Maeda3
et al.
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