2013
DOI: 10.1109/tasc.2012.2235892
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Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope

Abstract: Abstract-We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmicutilized to obtain a TES operating temperature between 520 and 540 mK. Excellent superconducting properties (transition width < 1 mK) and T c uniformity (< 3 mK) across 2 wafers were achieved by sputtering in a confocal system under a single vacuum using an independent RF bias applied to the substrate. Superconducting Nb dots patterned on… Show more

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Cited by 9 publications
(14 citation statements)
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“…The fabrication of these devices is similar to the fabrication of SPTpol TES bolometers [22]. Using AJA DC magnetron sputtering system, Mo and Au films are sequentially deposited at room temperature without substrate heating on a 250 μm thick silicon wafer with 1 μm thick silicon nitride on surface.…”
Section: Devices and Measurementsmentioning
confidence: 99%
“…The fabrication of these devices is similar to the fabrication of SPTpol TES bolometers [22]. Using AJA DC magnetron sputtering system, Mo and Au films are sequentially deposited at room temperature without substrate heating on a 250 μm thick silicon wafer with 1 μm thick silicon nitride on surface.…”
Section: Devices and Measurementsmentioning
confidence: 99%
“…Various groups worldwide have achieved performances approaching theoretical limits, but understanding the factors that determine the achieved performance remains a goal. TESs are currently used in ground-based telescopes such as EBEX, 3 SPTpol, 4 Keck/SPIDER, 5 and GISMO, 6 and will be used, or are proposed for use, in a number of upcoming space missions. 7,8 In its simplest form a TES consists of a superconducting thin-film (denoted here by S ′ ), typically ∼ 100 nm thick, operated very close to its superconducting transition temperature T c,S ′ .…”
Section: Introductionmentioning
confidence: 99%
“…These modifications reduce excess electrical noise 6 and change aspects of performance such as response times. 4,[9][10][11][12][13] In microcalorimeters normal-metal or semi-metal structures act as, or thermally couple to, photon absorbers. 14 Changes in the TES response time indicate a change in the small-signal electrothermal parameter α = (∂ ln R(T, I)/∂ ln T ) I , which characterizes the sharpness of the superconducting-normal resistive transition (here R is the TES resistance and I the bias current).…”
Section: Introductionmentioning
confidence: 99%
“…In state-of-the-art far-infrared and millimeter TES detectors operating at sub-Kelvin temperatures [4,5,10], the beam length L is much larger than ℓ, and the thermal conductance is often described by the Fourier law for phonon diffusion, G(T ) = κ(T ) wt/L, where w and t are the width and thickness of the beam, and κ(T ) is the bulk thermal conductivity of the dielectric. κ(T )…”
Section: Introductionmentioning
confidence: 99%
“…However, this approach rarely provides a complete view of the thermal physics, and higher order effects such as surface roughness of the beams have been identified as the likely cause of the reported non-uniformity in G across detector arrays [4,5].…”
Section: Introductionmentioning
confidence: 99%