Proceedings of the 21th LACCEI International Multi-Conference for Engineering, Education and Technology (LACCEI 2023): “Leaders 2023
DOI: 10.18687/laccei2023.1.1.1584
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Design and fabrication of a fume extractor controller for pulsed laser deposition of thin films

Juan Ignacio Hirschmann,
Josefina María Silveyra,
Juan Manuel Conde Garrido

Abstract: The deposition of thin films by pulsed laser deposition (PLD) is performed inside a deposition chamber. When the chamber is opened to change substrates and/or targets, the material deposited on the inner walls of the chamber releases vapors that are toxic in high concentrations. In order to improve user safety and optimize both time and resources, we fabricated a low-cost fume extraction system based on a domestic vacuum cleaner motor. The system, which proved to achieve an efficient flow rate and to work at a… Show more

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