Design and fabrication of a fume extractor controller for pulsed laser deposition of thin films
Juan Ignacio Hirschmann,
Josefina María Silveyra,
Juan Manuel Conde Garrido
Abstract:The deposition of thin films by pulsed laser deposition (PLD) is performed inside a deposition chamber. When the chamber is opened to change substrates and/or targets, the material deposited on the inner walls of the chamber releases vapors that are toxic in high concentrations. In order to improve user safety and optimize both time and resources, we fabricated a low-cost fume extraction system based on a domestic vacuum cleaner motor. The system, which proved to achieve an efficient flow rate and to work at a… Show more
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