Design and fabrication of a highly symmetrical capacitive triaxial accelerometer

Li, Gang; Li, Zhihong; Wang, Congshun; Hao, Yue; Li, Ting; Zhang, Dacheng; Wu, Guoying

doi:10.1088/0960-1317/11/1/308

Cited by 32 publications

(14 citation statements)

References 11 publications

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“…The designed accelerometer reported in the present study is, in its broadest sense a 3-axis accelerometer and similar to the simple mechanical configuration reported earlier by Riethmuller et al (1992) and Li et al (2001). The present structure is chosen only for demonstrating the proof of the concept and thus other structures may also be considered for performance improvement depending on the applications.…”

Section: Device Detailsmentioning

confidence: 86%

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

2011

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Coupled effects of an electroplated gold layer and damper holes drilled by Electro Chemical Discharge Machining (ECDM) process on the performance improvement of a quad beam capacitive accelerometer is presented in this paper. A simple quad beam-proof mass configuration with its beams located symmetrically at the centre of all the edges of the proof mass and connected to an outer supporting frame is considered in the present study. For a fixed damping ratio, prime-axis sensitivity of the sensor is increased by the damper holes whereas an electroplated gold layer improves the prime-axis sensitivity, cross-axis sensitivity, and Brownian Noise Equivalent Acceleration (BNEA). Moreover, the increased weight of the proof mass due to an electroplated gold layer further reduces the damping of the device which in turn helps to increase the prime-axis sensitivity more. A new figure of merit called Performance Factor (PF), defined as the ratio of the product of the primeaxis sensitivity and resonant frequency to the cross-axis sensitivity at a fixed damping ratio of 0.7 is used as a quantitative index to evaluate the performance improvement caused by the coupled effects of gold electroplating and ECDM processes. Simulation results show that for a device with damper holes of 8 lm diameter and electroplated gold layer of dimensions 3,000 lm 9 3,000 lm 9 20 lm, the prime-axis sensitivity is increased by more than 500 times, rotational cross-axis sensitivity and BNEA are reduced by around 10 and 30%, respectively and the PF is improved by around 482 times at a fixed damping ratio of 0.7.

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Section: Device Detailsmentioning

confidence: 86%

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

2011

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“…1,2 According to the different physical principles, acceleration sensors can be broadly classified into capacitive, 3,4 piezoresistive, 5 and piezoelectric 6−8 types, in which the capacitive and piezoresistive sensors require external power, which may limit their wide application. The piezoelectric sensor is self-powered, but the output electrical signal is very small and may be influenced by the environmental noise.…”

Section: ■ Introductionmentioning

confidence: 99%

Triboelectric Nanogenerators as a Self-Powered 3D Acceleration Sensor

Pang

Chen

et al. 2015

ACS Appl. Mater. Interfaces

149

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A novel self-powered acceleration sensor based on triboelectric nanogenerator is proposed, which consists of an outer transparent shell and an inner mass-spring-damper mechanical system. The PTFE films on the mass surfaces can slide between two aluminum electrodes on an inner wall owing to the acceleration in the axis direction. On the basis of the coupling of triboelectric and electrostatic effects, the potential difference between the two aluminum electrodes is generated in proportion to the mass displacement, which can be used to characterize the acceleration in the axis direction with a detection range from about 13.0 to 40.0 m/s(2) at a sensitivity of 0.289 V·s(2)/m. With the integration of acceleration sensors in three axes, a self-powered 3D acceleration sensor is developed for vector acceleration measurement in any direction. The self-powered 3D acceleration sensor has excellent performance in the stability test, and the output voltages have a little decrease of ∼6% after 4000 cycles. Moreover, the self-powered acceleration sensor can be used to measure high collision acceleration, which has potential practicability in automobile security systems.

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“…Due to the utilization of existing IC standards, MEMS techniques offer low cost mass production with a high degree of uniformity. MEMS sensors have been investigated with a variety of transduction mechanisms such as piezoresistive, capacitive and other sensing schemes (Seidel et al 1995;Reithmuller et al 1992;Ludtke et al 2000;Yeh and Najafi 1997;Song and Ajmera 2009;Li et al 2001).…”

Section: Introductionmentioning

confidence: 99%

“…The bandpass filter is used in a variety of applications such as communication system, navigation equipment and system control. Specially, mechanical filters are used for a good stability, low loss and narrow band selective systems (Johnson 1983). The bandpass filter is required to attenuate or reduce signals with frequencies outside passband, while passing signals within band.…”

Section: Introductionmentioning

confidence: 99%

Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme

2009

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This paper presents the theoretical and experimental behaviour of microelectromechanical bandpass filters. The proposed bandpass filter can detect frequencies of monitoring structures with high sensitivity using the resonant frequency of micro-resonator of sensor. The micro-resonator contains a proof mass and four supported beams fabricated using a bulk silicon micromachining technology on a silicon-on-insulator wafer. When applying an external force to the system, the device generates a capacitance change, which is converted into a voltage by an electrical circuitry. In good agreement with finite element simulations of the device, experimental results validate that the filter has a center frequency of about 3.3 kHz, a 3 dB bandwidth of 0.562 kHz and a quality factor Q of 5.9 in atmospheric pressure. This paper demonstrates a parallel-resonator filter to increase a monitoring bandwidth. A 3 dB bandwidth of the parallel filter is measured to be 1.25 kHz at atmospheric pressure.

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Design and fabrication of a highly symmetrical capacitive triaxial accelerometer

Cited by 32 publications

References 11 publications

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

Triboelectric Nanogenerators as a Self-Powered 3D Acceleration Sensor

Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme

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