Design and fabrication of a flexural harmonic AFM probe with an exchangeable tip

Sriramshankar, R.; Mrinalini, R. Sri Muthu; Jayanth, G. R.

doi:10.1007/s12213-017-0100-z

Cited by 4 publications

(2 citation statements)

References 29 publications

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“…In the focus positioning stage, the scanning probe tip did not contact the sample. The purpose of this stage is to use the optical microscope focusing algorithm to make the relative distance between the probe and the sample to a small order of magnitude, so that the tip of the probe can be brought into contact with the sample quickly during the fine approach [14][15].…”

Section: Precision Positioning Process Designmentioning

confidence: 99%

Positioning Technology of Tiny Electronic Components Based on Microscope and Computer Vision

2020

IJMC

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In recent years, with the rapid development of tiny electronic components. At present, commonly used optical inspection technology and electron microscope inspection technology find it difficult to meet the dimensional inspection requirements of key components of highly integrated integrated circuits. Based on computer micro-vision technology, the coupling of measuring platform displacement to the development of miniature electronic components is of great significance for the analysis and design of precision platforms. This paper analyzes the influence of the three factors of material, software and environment on the accuracy positioning of the measurement system. The analysis shows that the characteristics of the imaging system itself and the image noise it brings are the main factors that affect the measurement accuracy. In this paper, a technique for blindly detecting the position of the scanner based on computer vision is proposed. This article uses a CCD optical camera to capture the orbital motion of the electronic pen, and uses video image processing algorithms, computer vision and position to capture the position of the light on the screen. With the support of specific software, this article creates a new interactive whiteboard system. Any large screen can be turned into a large touch screen with electronic writing surface and touch function. The device does not require a specific additional screen to operate, and the cost is lower. In this paper, the stereo microscope has a narrow field of view, small depth of field and many non-linear factors. Based on the analysis of existing camera models, a binocular microscope imaging model based on a linear camera is established. On this basis, through the experimental analysis of the feasibility of the existing camera calibration method in the binocular microsystem, the calibration method of the camera's main parameters is proposed. Experiments show that the resolution value of the peak value of the evaluation curve in this paper is 18 times the focus resolution value, while the commonly used algorithm for evaluating the peak value of the curve is only 14 times. Compared with the latter, the discrimination of the edge gradient Laplacian used in this paper is more obvious than the former.

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Section: Precision Positioning Process Designmentioning

confidence: 99%

Positioning Technology of Tiny Electronic Components Based on Microscope and Computer Vision

2020

IJMC

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“…Our previous work proposed two types of harmonic probes through structural optimization, and the final design had a variable width and a step cross section. 15,16 Sriramshankar et al 17 designed and fabricated harmonic probes with exchangeable tip, and their proposed probe structure comprised a series of beams and blocks.…”

Section: Introductionmentioning

confidence: 99%

An optimized harmonic probe with tailored resonant mode for multifrequency atomic force microscopy

Shi

Xia

2018

Advances in Mechanical Engineering

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For simultaneously measuring specimen's surface morphology and material properties, multifrequency atomic force microscopy is often employed. In this kind of atomic force microscopy, if the probe's higher-order resonance frequencies match the integer multiples of its fundamental frequency, the probe's responses at such harmonic frequencies will be enhanced. Meanwhile, an enlarged effective slope during vibration at the probe's tip results in an improved probe sensitivity. Moreover, increasing the probe's natural frequency leads to a fast scanning speed. In this study, we propose to design cantilever probes that satisfy the aforementioned requirements via a structural optimization technique. A cantilever probe is represented by a three-layer symmetrical geometric model, and its width profile is continuously varied through the optimization procedure. Thereafter, an optimized design of probe considering the fifth harmonic is prepared by focused ion beam milling. Both simulation and experiment results show that the prepared probe agrees well with design requirements.

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Force Modulation Mode Harmonic Atomic Force Microscopy for Enhanced Image Resolution of Cell

Kang

Gao

Zhu

et al. 2023

Lecture Notes in Mechanical Engineering

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Design and fabrication of a flexural harmonic AFM probe with an exchangeable tip

Cited by 4 publications

References 29 publications

Positioning Technology of Tiny Electronic Components Based on Microscope and Computer Vision

Positioning Technology of Tiny Electronic Components Based on Microscope and Computer Vision

An optimized harmonic probe with tailored resonant mode for multifrequency atomic force microscopy

Force Modulation Mode Harmonic Atomic Force Microscopy for Enhanced Image Resolution of Cell

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