Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Abstract

The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss.

Design and Demonstration of Radio Frequency Micro Electro-Mechanical System Switches with Meandered Beams for Reduced Actuation Voltage

“…In fact, elongated membranes may determine an excessive footprint or aspect ratio for such basic switching components. As an example, the sole membrane employed in [17] has a footprint of 1600 × 240 µm 2 . Regarding the design of the beams, some examples can be traced in the recent literature, such as the fabricated samples described in [18,19], which are characterized by clamped-clamped structures with folded or convoluted beams and by the actuation voltages of 16 V and 5.8 V, respectively.…”

MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation

“…For this reason, the RF MEMS solution is still appealing to substitute semiconductor conventional switches or even bulky waveguide switches with planar, miniaturized, and fully passive devices. The ongoing interest in researching RF MEMS is also devoted to RF applications towards reconfigurability; for instance, the frequency agility of resonators [15,16] and antennas [17,18]. A new perspective for the feasible application of RF MEMS is opening up with regard to 5G/6G telecommunication technologies [19][20][21], where the lowest power consumption will be a key aspect [22,23].…”