Design and fabrication of a MEMS passive pressure sensor

Intraocular pressure (IOP) passive sensor modeling, design, fabrication and measurement

“…When calculating the diagonal elements of the moment matrix, a singularity appears for elliptic integration when putting the calculation points in/on the meshing elements. This is also a modeling problem for a former Master student's thesis [18]. Weber [19] introduced a concept of using a small but finite distance between the calculation point and the charge ring, permitting a definition of capacitance and this can also be understood as a skin depth in RF applications [20] (Fig.…”

“…The inductor works not only as the resonant element for the LC resonator, but also as the coupling element of the sensor which is detected by a external coil. On-chip spiral inductors are not preferred due to their low-Q and poor coupling effects [7], [8], [10], [11], [18].…”

“…The pressure is determined by detecting the capacitance change between the deformed diaphragm and the substrate electrode. This kind of application can be achieved by integrating the membrane structures with a CMOS circuit or inductive elements to obtain wired or wireless read-out [6]- [11], [18], [32], [33].…”