Design and fabrication of a SiN-Si dual-layer optical phased array chip

Wang, Pengfei; Luo, Gan; Yang, Xu; Li, Yajie; Su, Yanmei; Ma, Jianbin; Wang, Ruiting; Yang, Zhengxia; Zhou, Xuliang; Zhang, Yejin; Pan, Jiaoqing

doi:10.1364/prj.387376

Cited by 86 publications

(30 citation statements)

References 15 publications

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“…We have built a scanning test system to test the scanning range of the main lobe. This system can be found in our previous paper [28]. We tested the phase optimization capability of the OPA demo.…”

Section: Test Results and Analysismentioning

confidence: 99%

“…The optical antenna is used to emit beam into free space. We adopted the overall grating as the optical antenna for large scanning range, which is proposed in our previous work [11,28]. When the OPA chip works, in the lateral direction, the light in each adjacent waveguide will have a same phase difference φ after being modulated by each phase shifter, and the beam will steer to a specific angle (Ф).…”

Section: Structure and Characteristicsmentioning

confidence: 99%

“…The grating is fabricated on a wide Si slab, the grating period is 470nm, the duty cycle is 50%, and the etching depth is 70nm. The simulation performance of the antenna can be found in our previous papers [28], and this paper will not repeat it. Before being fabricated, we simulated the two-dimensional scanning range of Chip1 and Chip2 in the wavelength range of 1480-1580nm.…”

Section: Structure and Characteristicsmentioning

confidence: 99%

“…For OPA-based sensing systems, in order to meet practical needs, a large scanning range is very important. In recent years, silicon-based OPA has achieved larger and larger steering angles [20,24,28]. Among them, Columbia University has achieved the largest steering angle (180°) by adopting an end-fire optical phased array with half-wavelength pitch [24].…”

Section: Introductionmentioning

confidence: 99%

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Demonstration of 128-Channel Optical Phased Array With Large Scanning Range

Luo

Wang

et al. 2021

IEEE Photonics J.

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Section: Test Results and Analysismentioning

confidence: 99%

Section: Structure and Characteristicsmentioning

confidence: 99%

Section: Structure and Characteristicsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Demonstration of 128-Channel Optical Phased Array With Large Scanning Range

Luo

Wang

et al. 2021

IEEE Photonics J.

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“…Therefore, monolithic silicon integrated OPA cannot directly meet the requirement of the long-distance space optical communication. An alternative solution is to replace the silicon by a low-loss material of silicon nitride (SiN) [51]. Compared with silicon waveguide, SiN waveguide allows orders of magnitude higher optical power without significant nonlinear effect.…”

Section: Conclusion and Discussionmentioning

confidence: 99%

Review of Photonic Integrated Optical Phased Arrays for Space Optical Communication

He¹,

Dong²,

Xu³

2020

IEEE Access

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A review of photonic integrated optical phased array (OPA) for space optical communication is presented. We review and summarize the typical works of the photonic integrated OPAs with onedimensional and two-dimensional optical antenna array in recent years. The basic components of the photonic integrated OPA are introduced separately, including optical coupler, optical power division network, phase shifter, and optical antenna. In addition, the configuration of the optical antenna array and the control circuit are introduced for OPA beam steering. The basic principle and experiment setup for testing the radiation properties of the OPA are presented. A proof-of-concept nonuniform silicon integrated OPA with 64 antennas is designed and a one-dimensional beam steering range of 28° is achieved with beam width of about 0.25°. The challenges and development trends of large-scale integrated OPA chip applied in space optical communication are also discussed. INDEX TERMS Beam steering, large scale, optical phased array, photonic integration, space optical communication I. INTRODUCTION Recently, radio frequency (RF) communication has been widely used in our daily life, but the communication speed is low and cannot reach to a few Gbps. With the demand of large-capacity and high-speed communication, the communication frequency gradually expands to high frequency. Space optical communication possesses significant advantages of large communication capacity, convenient networking, concentrated energy and good security. With the rapid growth of satellite-to-ground and inter-satellite transmission bandwidth requirements, space optical communication will be an important means of highspeed inter-satellite communication and networking. The current satellite-borne laser communication terminal achieves acquisition, tracking and pointing (ATP) by using the mechanic servo and optical lens, but this method has some shortcomings, such as low steering speed, no beam agility, large volume and heavy weight. In the practical application of low earth orbit (LEO) satellite network with inter-satellite links, one of the satellite nodes of inter-satellite laser communication network needs to establish at least four links with its neighbors. As shown in Fig. 1, four links between LEO satellite A and its neighboring satellites B, C, D, and E are established, which include two links with satellite nodes in the same orbit and other two links with satellite nodes in different orbits. Due to the limitation of heavy weight and large volume of the mechanical servo and optical lens, the traditional beam-steering system cannot meet the requirement of inter-satellite networking for fast establishment of multiple links simultaneously.

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Graphene‐Based Silicon Photonic Devices for Optical Interconnects

Wang,

Cai,

Jiang

et al. 2023

Adv Funct Materials

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The exponential growth of global data traffic is driven by the unprecedented digitalization of the world. To meet the demands of next‐generation high‐capacity data communication systems, innovative solutions are required. Silicon photonics has gained significant attention due to its ability to integrate multiple core functions of optical interconnects into small‐scale chips, offering cost‐effective and scalable manufacturing capabilities. By leveraging silicon photonics, it becomes possible to address the challenge of scaling system complexity while reducing size, cost, and energy consumption. Despite its advantages, silicon has inherent limitations that restrict its application range, such as the weak plasma dispersion effect and relatively large bandgap. Recently, graphene has emerged as a promising solution for traditional silicon photonics because of its exceptional electrical and optical properties. For instance, graphene on a silicon chip enables nearly pure phase modulation and ultrafast photodetection beyond 500 GHz. Moreover, the demonstrated compatibility of graphene with wafer‐level integration paves the way for mass production of graphene‐based silicon photonic devices, offering improved yield, scalability, and cost‐effectiveness. In this work, a comprehensive review is provided, focusing on graphene‐based silicon photonic devices and their applications in optical interconnects, aiming to explore the potential of graphene in advancing silicon photonic technology.

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Design and fabrication of a SiN-Si dual-layer optical phased array chip

Cited by 86 publications

References 15 publications

Demonstration of 128-Channel Optical Phased Array With Large Scanning Range

Demonstration of 128-Channel Optical Phased Array With Large Scanning Range

Review of Photonic Integrated Optical Phased Arrays for Space Optical Communication

Graphene‐Based Silicon Photonic Devices for Optical Interconnects

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