Design and fabrication of a piezoelectric MEMS xylophone transducer with a flexible electrical connection

Zhao, Chuming; Knisely, Katherine E.; Grosh, Karl

doi:10.1016/j.sna.2018.03.038

Cited by 17 publications

(12 citation statements)

References 43 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The PIAT probes were fabricated 38,39 using the process described in the Methods section as summarized in Fig. S1.…”

Section: Resultsmentioning

confidence: 99%

“…The rigid straight silicon backbone, which prevents deeper insertion of the PIAT into the cochlea, could be made smaller and flexible. With a MEMS based flexible cable connection 39 , the electrical performance could also be improved by allowing for easier access to individual channels and reducing electrical parasitics by decreasing the distance of the MEMS sensor to the amplifier. Co-design of the amplifier circuit with the MEMS sensor will also decrease the minimum detectable signal improving function.…”

Section: Discussionmentioning

confidence: 99%

“…The piezoelectric material AlN was chosen to sense the acoustic pressure because of its low dielectric loss, compatibility with MEMS fabrication, and biocompatibility for chronic in vivo study 32,34,35 . Some preliminary design, fabrication and benchtop testing results of the transducer were reported previously 36–39 . In the work reported here, we further applied waterproof coating to the transducer and characterized its effect on the PIAT confirming the functionality in air and underwater.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Voltage readout from a piezoelectric intracochlear acoustic transducer implanted in a living guinea pig

Zhao

Knisely

Colesa

et al. 2019

Sci Rep

Self Cite

View full text Add to dashboard Cite

The ability to measure the voltage readout from a sensor implanted inside the living cochlea enables continuous monitoring of intracochlear acoustic pressure locally, which could improve cochlear implants. We developed a piezoelectric intracochlear acoustic transducer (PIAT) designed to sense the acoustic pressure while fully implanted inside a living guinea pig cochlea. The PIAT, fabricated using micro-electro-mechanical systems (MEMS) techniques, consisted of an array of four piezoelectric cantilevers with varying lengths to enhance sensitivity across a wide frequency bandwidth. Prior to implantation, benchtop tests were conducted to characterize the device performance in air and in water. When implanted in the cochlea of an anesthetized guinea pig, the in vivo voltage response from the PIAT was measured in response to 80–95 dB sound pressure level 1–14 kHz sinusoidal acoustic excitation at the entrance of the guinea pig’s ear canal. All sensed signals were above the noise floor and unaffected by crosstalk from the cochlear microphonic or external electrical interference. These results demonstrate that external acoustic stimulus can be sensed via the piezoelectric voltage response of the implanted MEMS transducer inside the living cochlea, providing key steps towards developing intracochlear acoustic sensors to replace external or subcutaneous microphones for auditory prosthetics.

show abstract

“…The PIAT probes were fabricated 38,39 using the process described in the Methods section as summarized in Fig. S1.…”

Section: Resultsmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Voltage readout from a piezoelectric intracochlear acoustic transducer implanted in a living guinea pig

Zhao

Knisely

Colesa

et al. 2019

Sci Rep

Self Cite

View full text Add to dashboard Cite

show abstract

“…In terms of acoustic transducers, there are the MEMS receiver [1,2], the dynamic receiver [3], the speaker box with passive radiator [4], and the balanced armature receiver [5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20]. The Balance armature structure was devized by Olsen [5].…”

Section: Introductionmentioning

confidence: 99%

Comparison of Multi-Physical Coupling Analysis of a Balanced Armature Receiver between the Lumped Parameter Method and the Finite Element/Boundary Element Method

Jiang

et al. 2019

Applied Sciences

View full text Add to dashboard Cite

The balanced armature receiver (BAR) is a product based on multiphysics that enables coupling between the electromagnetic, mechanical, and acoustic domains. The three domains were modeled using the lumped parameter method (LPM) that takes advantage of an equivalent circuit. In addition, the combined finite element method (FEM) and boundary element method (BEM) was also applied to analyze the BAR. Both simulation results were verified against experimental results. The proposed LPM can predict the sound pressure level (SPL) by making use of the BAR parts dimension and material property. In addition, the previous analysis method, FEM/BEM, took 36 h, while the proposed LPM takes 1 h. So the proposed LPM can be used to check the BAR parts’ dimension and material property influence on the SPL and develop the BAR product efficiently.

show abstract

“…Moreover, researchers are investigating new basic MEMS materials to meet the special needs of different applications. For example, flexible materials such as polydimethylsiloxane and polyimide film have been investigated and used as basic materials in preparing flexible and wearable MEMS devices [4][5][6]. High tensile-strength material has also been invented, such as the nickel-molybdenum-tungsten alloy, which is a strong material invented by Kevin J. Hemker's team at Johns Hopkins University.…”

Section: Introductionmentioning

confidence: 99%

Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

Zhang

Liu

et al. 2019

Applied Sciences

View full text Add to dashboard Cite

Graphite is expected to be a common choice for basic microelectromechanical-system (MEMS) material in the future. However, in order to become a basic MEMS material, it is very important for graphite to be adapted to the commonly-used micro-/nanoprocessing technology. Therefore, this paper used a directly lithography and etching process to study micro-, /nanoprocessing on graphite. The results show that the graphite surface is suitable for lithography, and that different shapes and sizes of photoresist patterns can be directly fabricated on the graphite surface. In addition, the micro-meter height of photoresist could still resist plasma etching when process nanometers height of graphite structures. Therefore, graphite with photoresist patterns were directly processed by etching, and nanometer amounts of graphite were etched. Moreover, micro-/nanoscale graphite structure with height ranges from 29.4 nm–30.9 nm were fabricated with about 23° sidewall.

show abstract

Design and fabrication of a piezoelectric MEMS xylophone transducer with a flexible electrical connection

Cited by 17 publications

References 43 publications

Voltage readout from a piezoelectric intracochlear acoustic transducer implanted in a living guinea pig

Voltage readout from a piezoelectric intracochlear acoustic transducer implanted in a living guinea pig

Comparison of Multi-Physical Coupling Analysis of a Balanced Armature Receiver between the Lumped Parameter Method and the Finite Element/Boundary Element Method

Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

Contact Info

Product

Resources

About