Design and fabrication of a microlens array by use of a slow tool servo

Yi, Allen Y.; Li, L

doi:10.1364/ol.30.001707

Cited by 161 publications

(74 citation statements)

References 16 publications

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“…Ultraprecision machining technologies, such as diamond micro-milling and single point diamond turning (SPDT) are effective methods to fabricate microstructures and nanostructures with good uniformity in a large area [18,21,[56][57][58]. Such ultraprecision technologies are integrated into the process chain for mass fabrication of microlens arrays.…”

Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

“…To our knowledge, the bottom of the each concave microlens is affected by the alignment error (around 1 μm) between the vertex of the cutting edge and the spindle axis. With regard to this, the single point diamond turning (SPDT) method is performed to produce microlens arrays with high quality by a slow slide servo [18,19,58] or a fast tool servo [21,59,60].…”

Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

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Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

140

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Microlens arrays are the key component in the next generation of 3D imaging system, for it exhibits some good optical properties such as extremely large field of view angles, low aberration and distortion, high temporal resolution and infinite depth of field. Although many fabrication methods or processes are proposed for manufacturing such precision component, however, those methods still need to be improved. In this review, those fabrication methods are categorized into direct and indirect method and compared in detail. Two main challenges in manufacturing microlens array are identified: how to obtain a microlens array with good uniformity in a large area and how to produce the microlens array on a curved surface? In order to effectively achieve control of the geometry of a microlens, indirect methods involving the use of 3D molds and replication technologies are suggested. Further development of ultraprecision machining technology is needed to reduce the surface fluctuation by considering the dynamics of machine tool in tool path planning. Finally, the challenges and opportunities of manufacturing microlens array in industry and academic research are discussed and several principle conclusions are drawn.

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Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

140

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show abstract

“…[16][17][18] We may be even possible to fabricate a deformed WGM microcavities 19 by using similar technique such as a slow tool servo system. 20 In this study we try to control the diameter of the CaF 2 WGM microcavity to allow us to study the impact of cavity diameter on TOM oscillation behavior. A photograph taken of our ultra-precision cutting is shown in FIG.…”

Section: Fabrication Of Caf 2 Wgm Microcavity With Ultra-precisiomentioning

confidence: 99%

Bi-material crystalline whispering gallery mode microcavity structure for thermo-opto-mechanical stabilization

et al. 2016

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We fabricated a calcium fluoride (CaF2) whispering gallery mode (WGM) microcavity with a computer controlled ultra-precision cutting process. We observed a thermo-opto-mechanical (TOM) oscillation in the CaF2 WGM microcavity, which may influence the stability of the optical output when the cavity is employed for Kerr comb generation. We studied experimentally and numerically the mechanism of the TOM oscillation and showed that it is strongly dependent on cavity diameter. In addition, our numerical study suggests that a microcavity structure fabricated with a hybrid material (i.e. CaF2 and silicon), which is compatible with an ultra-high Q and high thermal conductivity, will allow us to reduce the TOM oscillation and stabilize the optical output.

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“…Direct fabrication of lens arrays by diamond turning in polymer materials have been demonstrated [23][24][25][26][27][28] to achieve the high optical surface quality. Although the direct diamond turning process is a one step process, due to process difficulty and expensive tooling, the fabrication process cost could be in the order of USD 100 -1000 /mm 2 .…”

Section: Introductionmentioning

confidence: 99%