2023
DOI: 10.13164/re.2023.0044
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Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

Abstract: This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric -polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2% compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the be… Show more

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