2014
DOI: 10.1364/oe.22.012349
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Design and fabrication of broadband guided-mode resonant reflectors in TE polarization

Abstract: We present the design and fabrication of guided-mode resonant broadband reflectors operating in transverse electric (TE) polarization. The structure consists of a subwavelength one-dimensional grating with a two-part period and a nanometric homogeneous layer of amorphous silicon on a quartz substrate. A representative reflector exhibits 99% reflectance over a 380-nm spectral range spanning 1440-1820 nm. The fabrication involves thin-film deposition, interferometric lithography, and reactive ion etching. Experi… Show more

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Cited by 17 publications
(12 citation statements)
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“…RWGs can also be utilized to make efficient wideband reflectors using a periodic array of high‐index scatterers on a low index layer (Figure b,c) . The bandwidth and the efficiency of the broadband reflectors with partially etched RWGs can be tuned with the grating depth, fill factor, the thickness of the homogeneous layer, and with tapered sidewalls . Efficient wideband reflectors with steep sidewalls can be obtained by operating RWGs at the proximity of the Rayleigh angle .…”
Section: Effects Associated With Rwgsmentioning
confidence: 99%
See 1 more Smart Citation
“…RWGs can also be utilized to make efficient wideband reflectors using a periodic array of high‐index scatterers on a low index layer (Figure b,c) . The bandwidth and the efficiency of the broadband reflectors with partially etched RWGs can be tuned with the grating depth, fill factor, the thickness of the homogeneous layer, and with tapered sidewalls . Efficient wideband reflectors with steep sidewalls can be obtained by operating RWGs at the proximity of the Rayleigh angle .…”
Section: Effects Associated With Rwgsmentioning
confidence: 99%
“…tapered sidewalls. [154][155][156] Efficient wideband reflectors with steep sidewalls can be obtained by operating RWGs at the proximity of the Rayleigh angle. [157] When an RWG resonates at an angle corresponding to the Rayleigh anomaly, the zeroth-order reflection energy is almost completely transferred into a first-order transmitted mode with a sharp transition, as shown in Figure 9.…”
Section: Narrowband and Broadband Filtersmentioning
confidence: 99%
“…In addition to providing means for novel optical elements, such as wavelength selective mirrors, polarizers [1], waveplates [2], tunable filters [3][4][5][6][7] and ultrabroadband mirrors [8], such resonant gratings have increasingly found their way into a myriad of different sensing applications, such as chemical and environmental sensing [9,10], label-free biosensing [11][12][13], cancer screening [14,15], photonic crystal enhanced microscopy [16] and three dimensional imaging [17]. These resonant gratings, referred to here as photonic crystal slabs (PCS) [18], but also known as guided mode resonance filters or reflectors [1,19] and photonic crystal resonant reflectors [20] in the literature, are essentially slab waveguides in which the high refractive index waveguide core is in some way periodically modulated, such as by refractive index or thickness, and surrounded by cladding media of lower refractive indices [1,18]. The periodically modulated waveguide core is able to sustain quasi-guided or leaky waveguide modes, which couple to the far field [21].…”
Section: Introductionmentioning
confidence: 99%
“…For most practical applications, resonances with strong intensity and narrow linewidth are desirable. [8,[21][22][23][24][25][26][27][28][29][30][31] The GMR filter primarily comprises of a diffractive grating and an in-plane waveguide. However, most of the resonances are constrained by the trade-off between resonance intensity and linewidth.…”
mentioning
confidence: 99%
“…[35] The 2D array of silicon cuboid resonators acts as a grating and more importantly, the silicon metasurface also acts as a homogeneous core layer that support slab waveguide modes, governed by total internal reflection (TIR) [36] (see Supporting Information for details). The combination of the waveguiding criteria (i.e., TIR) and the grating equation provides the critical condition for the realization of GMR, which is given by: n sin [8,[21][22][23][24][25][26][27][28][29][30][31][32][33]36] where Λ is the lattice period, λ is wavelength and the corresponding frequency is given by f = c/λ . The modes that lie above the light line are radiative in nature, while those lying below are guided within the slab waveguide.…”
mentioning
confidence: 99%