Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers

Abstract

Hyperspectral infrared imagers are of great interest in applications requiring remote identification of complex chemical agents. The combination of mercury cadmium telluride detectors and Fabry-Perot filters (FPFs) is highly desirable for hyperspectral detection over a broad wavelength range. The geometries of distributed Bragg reflector (DBR)-based tunable FPFs are modeled to achieve a desired spectral resolution and wavelength range. Additionally, acceptable fabrication tolerances are determined by modeling the spectral performance of the FPFs as a function of DBR surface roughness and membrane curvature. These fabrication nonidealities are then mitigated by developing an optimized DBR process flow yielding high-performance FPF cavities suitable for integration with hyperspectral imagers. Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 05/16/2015 Terms of Use: http://spiedl.org/terms

Strong light‐matter coupling between a molecular vibrational mode in a PMMA film and a low‐loss mid‐IR microcavity

“…The combination of Ge and ZnS for fabricating DBRs for the mid-IR range was reported once using sputtering [23]. A model of microcavity structures with Ge/ZnS for both mirrors predicted that high quality factors should be attainable with these materials [24]. Here, we introduce thermal-evaporation of the Ge and ZnS materials to produce bottom and top DBRs in the mid-IR microcavity.…”