Design and fabrication of flexible piezo-microgenerator by depositing ZnO thin films on PET substrates

Pan, C. T.; Liu, Z.H.; Chen, Y.C.; Liu, C.F.

doi:10.1016/j.sna.2010.02.023

Cited by 71 publications

(23 citation statements)

References 12 publications

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“…The simple mass-spring system obeys a second order differential equation, as given by [15][16][17]. (29) where m is the inertial mass, k is the spring constant (N/m), b is the damping coefficient (N-s/m) or the damping factor, and a is the acceleration due to external force F. Solving this equation (29), the mechanical transfer function from an acceleration to displacement of the mass is obtained as (30) The frequency response of this system can be written as In the design of the piezoelectric accelerometer,an optimal damping factor of 0.7 is preferable to achieve maximum bandwidth. Hence, the air gap between the proof mass and the top and bottom caps to achieve double sided squeezed film air damping in the piezoelectric accelerometer was designed by setting ξ = 0.7…”

Section: Frequency Response Analysismentioning

confidence: 99%

“…Active materials with larger piezoelectric constants, such as Lead ZirconateTitanate (PZT), can widen the performance gap of piezoelectric accelerometers [11,[18][19][20][21][22][23][24][25][26][27]. Zinc Oxide (ZnO) has also been employed for active piezoelectric film due to its relatively simple and repeatable deposition using single-target RF sputtering, the ability to produce largearea films without pinholes, and proven compatibility with IC (integrated circuit) integration [28][29][30]. Various reports have described piezoelectric accelerometers using other piezoelectric materials such as YCOB crystals, PVDF, TrFE, Pb(Zr,Ti) O 3 , and Pb(Mn 1/3 Nb 2/3 )O 3 [31][32][33].…”

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confidence: 99%

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A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

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Section: Frequency Response Analysismentioning

confidence: 99%

mentioning

confidence: 99%

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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show abstract

“…Active materials with larger piezoelectric constants, such as PZT, can widen the performance gap of piezoelectric accelerometers [34,[37][38][39][40][41][42][43][44][45]. ZnO has also been employed for the active piezoelectric film due to relatively simple and repeatable deposition using single-target RF sputtering, the ability to produce large-area films without pinholes, and proven compatibility with IC integration [46][47][48]. There are reports that describe piezoelectric accelerometers using other piezoelectric materials too [49][50][51].…”

Section: Introductionmentioning

confidence: 99%

Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications

Bhaskaran

Rathnasami

Sumangala

et al. 2017

Smart Materials Research

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Wireless Structural Health Monitoring (WSHM) is a less expensive but efficient mode of health monitoring. However, it needs frequent change of batteries since remote WSHM consumes large power. The best scientific solution to this problem is to employ energy harvesters integrated along with the vibration sensors in the same substrate so that the battery is recharged by the energy harvested during vibrations caused by the passing vehicles in bridges. In this work, an attempt has been made to design an energy harvester and a micro accelerometer integrated chip. Civil structures have low natural frequencies and therefore low bandwidth design is adopted to maximize the harvested energy and accelerometer sensitivity. The other special feature of the proposed design is its ability to provide further increase in energy harvesting by the parallel operation of an array of energy harvesters with closely spaced natural frequencies. The studies show that the natural frequencies of the harvesters should be less than that of the structure in healthy condition. Simulation studies conducted on these devices show that it is possible to harvest a maximum power of 2.283 mW/g. The integrated micro accelerometer is also capable of giving a sensitivity of 27.67 V/g with appreciable improvement in other performance indices.

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“…In particular, the use of piezoelectric generators by nanomaterials as a simple and effective solution for mechanical energy harvesting has attracted considerable attention. (1) In addition, devices such as piezoelectric (2)(3)(4)(5)(6) transducers should operate at high-frequency vibrations to create a higher power generation efficiency. These energy harvesters become one of the key factors in these designs.…”

Section: Introductionmentioning

confidence: 99%

Near-Field Electrospinning with Close-Loop Motor Control for Manufacturing Polyvinylidene Fluorid Fibers

2017

Sensors and Materials

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In this study, we report a close-loop motor control for a cylindrical collector to obtain continuous and uniform polyvinylidene fluoride (PVDF) piezoelectric fiber arrays using near-field electrospinning (NFES). The as-spun PVDF piezoelectric nanofibers were laid on the top of parallel electrodes to generate current and voltage signals by means of mechanical energy of low-frequency vibrations being converting to electrical energy. The PVDF fibers can be used as a flexible sensing device, such as a smart fabric, owing to their excellent voltage response. A PVDF fiber with continuous and uniform diameter is expected to have stable energy conversion for achieving higher electrical current and voltage signals. To ensure the quality of the production process, a closeloop system for motor speed control was designed to improve on the disadvantages of open-loop systems, such as sensitivity to disturbances and inability to compensate for these disturbances automatically. Transient response and steady-state error can be controlled more conveniently and accurately. The experimental scheme was designed using Taguchi Methods. A mixed solution of 18 wt% PVDF was placed in a metal needle injector and driven by a syringe pump at 0.2, 0.4, and 0.8 ml/h feeding rates. The needles with 0.2, 0.25, and 0.33 mm diameters were subjected to 13k, 15k, and 17k high voltages with a gap of 1 mm between the metal needle and the cylindrical collectors (electrical fields: E =1.3 × 10 7 , 1.5 × 10 7 , and 1.7 × 10 7 V/m, respectively). The metal needle travelled in the axial direction of the cylindrical collectors at120, 160, and 200 mm/min, respectively. The cylindrical collector motor operated with six different speeds in the range of 900-1900 rpm. With the motor speed control system, about I p-p = 8.8 × 10 −7 A (I max = −5.0 × 10 −7 A) and V p-p = 0.22 V (V max = −0.12 V) were obtained from the PVDF piezoelectric fiber array, which is obviously better than its counterpart of about I p-p = 3.2 × 10 −7 A (I max = −2.1× 10 −7 A) and V p-p = 0.17 V (V max = −0.10 V) with the open-loop system.

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Design and fabrication of flexible piezo-microgenerator by depositing ZnO thin films on PET substrates

Cited by 71 publications

References 12 publications

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications

Near-Field Electrospinning with Close-Loop Motor Control for Manufacturing Polyvinylidene Fluorid Fibers

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