Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer

Pan, Min-Chun; Bui, Tuan-Anh; Nien, Yu-Chuan; Shih, Wen–Ching

doi:10.7567/jjap.50.07hd02

Jpn. J. Appl. Phys.

2011

DOI: 10.7567/jjap.50.07hd02

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Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer

Min-Chun Pan

Tuan-Anh Bui

Yu-Chuan Nien

et al.

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Cited by 3 publications

(2 citation statements)

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“…In the latter aspect, it is analogous to gradient-index (GRIN) and other such thin lenses, [8][9][10][11][12] with the exception that its index of refraction is not spatially profiled beforehand.…”

mentioning

confidence: 98%

“…There are three key differences that distinguish this work from previous studies: (1) it exploits a different mechanism, namely, the large refractive index change occurring during a phase transition from insulator-to-metal, (2) the focusing capability is dynamic, and can be adjusted in real time, and (3) the material used is uniform and does not require prior physical patterning. In the latter aspect, it is analogous to gradient-index (GRIN) and other such thin lenses, [8][9][10][11][12] with the exception that its index of refraction is not spatially profiled beforehand.…”

mentioning

confidence: 98%

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Nanometer-thick flat lens with adjustable focus

Son

Vallée

et al. 2014

Applied Physics Letters

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We report laser beam focusing by a flat, homogeneous film with a thickness of less than 100 nm. The effect relies on refractive index changes occurring in vanadium dioxide as it undergoes a phase transition from insulator to metal. Phase front curvature is achieved by means of temperature gradients, and adjustable focal lengths from infinity to 30 cm are attained. V C 2014 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4903887] Thin flat lenses have found applications in areas such as integrated optics and satellite optical instruments, where lightweight and small-volume optical components are desired, as well as x-ray optics, where standard lens materials are ineffective. While the traditional approach to creating thin lenses is based on the Fresnel zone plate design, there has been a resurgence of activity exploiting effects of nanoplasmonics and metamaterials. For example, a quasiperiodic arrangement of sub-wavelength holes on a thin gold film was found to focus light to sub-wavelength spatial resolution. 1-3 Similarly, light focusing by ultrathin lenses was demonstrated by exploiting the properties of nano-antennas etched on a surface, 4,5 thus forming a type of optically functionalized metasurface. 6,7 In this paper, we report yet an alternative method for focusing light with a thin layer of material. There are three key differences that distinguish this work from previous studies:(1) it exploits a different mechanism, namely, the large refractive index change occurring during a phase transition from insulator-to-metal, (2) the focusing capability is dynamic, and can be adjusted in real time, and (3) the material used is uniform and does not require prior physical patterning. In the latter aspect, it is analogous to gradient-index (GRIN) and other such thin lenses, [8][9][10][11][12] with the exception that its index of refraction is not spatially profiled beforehand.When light interacts with a layer of vanadium dioxide (VO 2 ), it acquires a phase shift which depends on the state of the material. In the temperature range where VO 2 undergoes a transition from insulator to metal (roughly 50-80 C), the optical phase shift is approximately linear with temperature, as was shown in a previous study. 13 Figure 1 illustrates the concept. Figure 2 presents ellipsometry measurements showing the change in refractive index as VO 2 undergoes a phase transition. Given the complex refractive indices, Fresnel reflection coefficients at the air/VO 2 and VO 2 /substrate interfaces introduce phase shifts of 0.51 rad and 0.75 rad, respectively, during the phase transition of the material. Meanwhile, the round-trip propagation phase in the layer varies by À1.0 rad. From this we conclude that both propagation and reflection phases are responsible for the observed phase shift.From Figure 1(b), we see that between a temperature T A (the onset of the phase transition) and a temperature T B (the end of the phase transition), the optical phase shift from VO 2 changes by some amount D/. As a result, by mean of a temperature gradien...

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mentioning

confidence: 98%

mentioning

confidence: 98%

Nanometer-thick flat lens with adjustable focus

Son

Vallée

et al. 2014

Applied Physics Letters

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Focusing efficiency evaluation of ultrasonic energy for fabricated Fresnel lens through surface profile estimation and FEA

Bui

Pan

2017

Ferroelectrics

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Using SiO<sub>2</sub> Hard Mask for Fabrication of Micro Fresnel Focusing Lens for Ultrasonic Ejectors

Bui

Pan

et al. 2020

KEM

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The fabrication of Fresnel focusing lenses operating at frequencies of 100 and 200 MHz was investigated in order to enhance the focusing efficiency of ultrasonic energy. The effects of process parameters on the four-level Fresnel lens profiles were discussed to find a most feasible fabrication procedure through these experiments. The quality of Fresnel lenses was improved when two-and three-mask processes using SiO2 film as the hard mask were employed. Besides, a better side-wall profile of Fresnel lens was obtained by using the three-mask process as compared to the two-mask one.

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Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer

Cited by 3 publications

References 18 publications

Nanometer-thick flat lens with adjustable focus

Nanometer-thick flat lens with adjustable focus

Focusing efficiency evaluation of ultrasonic energy for fabricated Fresnel lens through surface profile estimation and FEA

Using SiO<sub>2</sub> Hard Mask for Fabrication of Micro Fresnel Focusing Lens for Ultrasonic Ejectors

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