1993
DOI: 10.1364/ao.32.002494
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Design and fabrication of high-efficiency beam splitters and beam deflectors for integrated planar micro-optic systems

Abstract: High-frequency gratings with rectangular-groove profiles are used to generate high-efficiency beam splitters and beam deflectors. The effects of the grating design parameters, i.e., period, groove depth, duty cycle, number of phase levels, and polarization state (TE and TM) of the incoming signal, are considered. The case of the binary beam splitter grating is analyzed by using rigorous electromagnetic grating analysis. Fabrication techniques are presented in which three different lithographic techniques are c… Show more

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Cited by 45 publications
(23 citation statements)
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“…(a) Approach using waveguide holograms (after [15]). (b) Approach using free space optics (after [17]). …”
Section: Planar Diffractive Units For Optical Clock Distributionmentioning
confidence: 99%
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“…(a) Approach using waveguide holograms (after [15]). (b) Approach using free space optics (after [17]). …”
Section: Planar Diffractive Units For Optical Clock Distributionmentioning
confidence: 99%
“…Figure 5b illustrates a "planar micro-optic system" described by Walker et al [17]. This example is designed to split an incident beam into four beams, the four beams exiting from the opposite surface as the entering beam.…”
Section: Planar Diffractive Units For Optical Clock Distributionmentioning
confidence: 99%
“…9 On the other hand, holographic gratings 10 can function as beamsplitters and beam deflectors very well. When two gratings are arranged as a substrate-mode hologram, it can function as a polarization beamsplitter 10,11 and it can be used to replace the conventional crystal spatial walk-off polarizer. 12 To mitigate the drawbacks, an alternative type of multiport polarization-independent wavelength-interleaving bidirectional quasicirculator based on holographic spatial and polarization modules ͑HMs͒ is proposed in this paper.…”
Section: Introductionmentioning
confidence: 99%
“…array illumination, multiple imaging in digital microoptics, optical information processing, laser processing, etc. [28,29]. A large number of these applications require an efficient use of the available light and therefore the grating is often chosen to be a phase grating rather than an amplitude grating.…”
Section: Introductionmentioning
confidence: 99%