Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

González, Gabriel; Kolosovas-Machuca, Eleazar Samuel; López‐Luna, E.; Hernández-Arriaga, Heber; González, Francisco

doi:10.3390/s150101998

Cited by 22 publications

(12 citation statements)

References 11 publications

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“…The change in mass on the surface of a QCM is related to the shift in resonance frequency using the Sauerbrey equation [ 69 ], which is written as follows:

where Δ m is the change in mass on the surface of the QCM, a is the surface area of the gold-coated region of QCM, ρ q is the density of quartz, µ q is the shear modulus of quartz, f 0 is the resonance frequency of blank QCM, and Δ f is the shift in resonance frequency caused by change in mass. In case of IDE capacitors, the capacitance reactance at drive frequency f using closed-form solution with N number of electrodes ( N > 3) [ 70 , 71 ] is calculated as follows:

where C IDE is calculated using

where C I and C E are calculated using

where L is the length of electrodes, ε 1 is the relative permittivity of the layer coated onto the IDE, ε S is the relative permittivity of the substrate, ε 0 is the relative permittivity of free space, K ( k ) is the complete integral of the first kind with modulus k ,

, W is the width of each electrode, and G is the gap between the IDE.…”

Section: Resultsmentioning

confidence: 99%

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Chappanda

Tchalala

Shekhah

et al. 2018

Sensors

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We present a comparative study of two types of sensor with different transduction techniques but coated with the same sensing material to determine the effect of the transduction mechanism on the sensing performance of sensing a target analyte. For this purpose, interdigitated electrode (IDE)-based capacitors and quartz crystal microbalance (QCM)-based resonators were coated with a zeolitic–imidazolate framework (ZIF-8) metal–organic framework thin films as the sensing material and applied to the sensing of the volatile organic compound acetone. Cyclic immersion in methanolic precursor solutions technique was used for depositing the ZIF-8 thin films. The sensors were exposed to various acetone concentrations ranging from 5.3 to 26.5 vol % in N2 and characterized/compared for their sensitivity, hysteresis, long-term and short-term stability, selectivity, detection limit, and effect of temperature. Furthermore, the IDE substrates were used for resistive transduction and compared using capacitive transduction.

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“…The change in mass on the surface of a QCM is related to the shift in resonance frequency using the Sauerbrey equation [ 69 ], which is written as follows:

where C IDE is calculated using

where C I and C E are calculated using

, W is the width of each electrode, and G is the gap between the IDE.…”

Section: Resultsmentioning

confidence: 99%

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Chappanda

Tchalala

Shekhah

et al. 2018

Sensors

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“…The capacitance of a coplanar sensor with two dielectric materials has been considered previously by many authors [33,34,35,36,37,38]. A good approximation of the capacitance calculation for the coplanar strip electrodes model is the conformal mapping technique (CMT) [28,30].…”

Section: Design Methodologymentioning

confidence: 99%

Development of a Flexible Dielectric Sensor for Flow Monitoring of the Liquid Resin Infusion Process

Pouchias

Cunningham

Stein

et al. 2019

Sensors

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The analysis and design of a novel flexible dielectric sensor, which can be integrated into a composite materials manufacturing process to measure the resin frontal flow, is presented in this paper. The proposed sensor consists of two parallel line electrodes and a ground plane covered by a dielectric material. The analytical description and the electrostatic modelling were considered for the design of the sensor and to enhance the understanding of the response of the sensor to the resin impregnation of a carbon fabric during the infusion phase. The optimization of the sensor’s response and the increase of its sensitivity with regards to the geometric characteristics and the materials used were the main objectives of this study. An experimental set-up for the vacuum infusion process which includes the proposed sensor was used to measure the capacitance and validate the derived resin flow against visual measurements. The results indicate that the sensor can provide information on the resin frontal flow within 2% accuracy against visual measurements, which make this technology promising for monitoring the liquid resin infusion processes.

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“…1is provided only to present all parameters that affects capacity value of standard parallel plate capacitor or some specific planar capacitive sensor structures. More sophisticated equation [2] that contains the lines width and spacing, thickness and relative permittivity of substrate and surrounding environment and many more parameters, is required to calculate capacity of planar comb sensor structure. It is therefore recommended to use some of the available multiphysics software tools to model and calculate the parameters of specific sensor structure.…”

Section: Capacitive Sensing Principlementioning

confidence: 99%

Possibilities of Planar Capacitive Rain Sensor Manufacturing by Thick Film Technology

Zuk¹,

Pietriková²,

Vehec³

2018

AEI

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In this paper, characterization and realisation of planar thick film rain sensor based on capacitive principle is presented. By using three different pastes (inks) for realisation of capacitive sensor it was found out that sensor produced by carbon ink is not suitable for use in this application because it shows no change in measured capacitance when temperature or humidity level varies. The best characteristics were obtained by using silver conductive paste. Capacity of capacitive sensor realized by polymer silver paste shows rising tendency when temperature and humidity values rises.

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Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

Cited by 22 publications

References 11 publications

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

A Comparative Study of Interdigitated Electrode and Quartz Crystal Microbalance Transduction Techniques for Metal–Organic Framework-Based Acetone Sensors

Development of a Flexible Dielectric Sensor for Flow Monitoring of the Liquid Resin Infusion Process

Possibilities of Planar Capacitive Rain Sensor Manufacturing by Thick Film Technology

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