Design and fabrication of large spectral waveband mirror coatings for scanning Fabry-Perot etalons

Evans, Clinton; Poirier, Michel; Scott, Alan; Touahri, D.; Ilias, S.; Doyon, René

doi:10.1117/12.795342

Cited by 2 publications

(4 citation statements)

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“…During the TFI LW-Stretched coating stack first half fabrication [1], analysis difficulties were encountered. The single layer a-Si/SiO 2 n & k optical properties failed to properly describe a 9-layer SiO 2 /a-Si stack on a silicon witness substrate.…”

Section: -Layer Stack Analysis With Single Layer Optical Propertiesmentioning

confidence: 99%

“…Standard crystal monitoring is used to control deposited thicknesses of each layer of the LW-Stretched or VWBBAR coating stacks on the witness and TFI etalon plates. Other deposition parameters of the process are described in previously published paper [1].…”

Section: Coating Deposition and Optical Characterization Systemmentioning

confidence: 99%

“…The TFI uses a scanning Fabry-Perot cavity to select any desired wavelength within the operational waveband. The continuously adjustable Fabry-Perot cavity is described within other publications [1][2] and relies on a two silicon high flatness etalon plates coated with a thin film stack. The reflector stack is based on alternating layers of a-Si and SiO 2 for cryogenic operation [3], which provides the largest refractive index difference over the initial dual band instrument imager which was covering 0.8-2.5μm and 2.5-4.5μm.…”

Section: Introductionmentioning

confidence: 99%

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Spectroscopic ellipsometry of a-Si/SiO 2 large waveband coating for the JWST-FGS-TFI etalon plates fabrication

et al. 2010

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Previous publications for the JWST-FGS-TFI instrument described the design and fabrication of mirror coatings for scanning Fabry-Perot etalons. Since that time, we have extended the fabrication process using ellipsometry analysis over the full operational bandwidth from 1.0 to 5.0 microns for both mirror and anti-reflection coatings. This paper will present single and multiple layer ellipsometry analysis of the a-Si/SiO 2 optical properties. Analysis improvement came from a-Si/SiO 2 interface consideration and simultaneous use of ellipsometric data from Woollam V-VASE and IR-VASE instruments. Simulations of reflectance and transmittance based on the ellipsometric analysis results will also be compared to spectrophotometric measurements for witness pieces.

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Section: -Layer Stack Analysis With Single Layer Optical Propertiesmentioning

confidence: 99%

Section: Coating Deposition and Optical Characterization Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Spectroscopic ellipsometry of a-Si/SiO 2 large waveband coating for the JWST-FGS-TFI etalon plates fabrication

et al. 2010

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“…INO's efforts are increasingly focused on space applications using micro-electro-mechanical systems, including uncooled microbolometer FPAs, thin films [4], packaging, and optical design technologies [5]. Section 2 gives an overview of the design of INO's radiometric package while t h e r e s u l t s of the characterization of key performance p a r a m e t e r s are described in Section 3.…”

Section: Introductionmentioning

confidence: 99%

Radiometric packaging of uncooled bolometric infrared focal plane arrays

García-Blanco

Pope

Côté

et al. 2017

International Conference on Space Optics — ICSO 2008

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INO has a wide e x p e r i e n c e i n t h e d e s i g n a n d fabrication of different kinds of microbolometer focal plane arrays (FPAs). In particular, a 5 1 2 x 3 pixel microbolometer FPA has been selected as the sensor for the New Infrared Sensor Technology (NIRST) instrument, one of the payloads of the S A C -D/Aquarius mission. In order to make the absolute temperature measurements necessary for many infrared Earth observation applications, the microbolometer FPA must be integrated into a package offering a very stable thermal environment. The radiometric packaging technology developed at INO presents an innovative approach since it was conceived to be modular and adaptable for the packaging of different microbolometer FPAs and for different sets of assembly requirements without need for requalification of the assembly process. The development of the radiometric packaging technology has broadened the position of INO as a supplier of radiometric detector modules integrating FPAs of microbolometers inside a radiometric package capable of achieving the requirements of different space missions. This paper gives an overview of the design of INO's radiometric package. Key performance parameters are also discussed and the test campaign conducted with the radiometric package is presented.

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Design and fabrication of large spectral waveband mirror coatings for scanning Fabry-Perot etalons

Cited by 2 publications

References 0 publications

Spectroscopic ellipsometry of a-Si/SiO 2 large waveband coating for the JWST-FGS-TFI etalon plates fabrication

Spectroscopic ellipsometry of a-Si/SiO 2 large waveband coating for the JWST-FGS-TFI etalon plates fabrication

Radiometric packaging of uncooled bolometric infrared focal plane arrays

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