Design and fabrication of silicon micro components

Abstract

Due to their manifold benefits microsystems are being regarded as a key technology for innovation in many branches of industry. One of the leading techniques for the fabrication of microsystems is silicon micromachining. The paper reports on a modular environment for the design of silicon micro components and gives some examples of micromachined devices developed at Braunschweig.

Application of UV depth lithography in micro system technology

“…For some twenty years outstanding sensors, actuators and micro components have been developed using silicon-micromachining [1] . However, there is also strong need for metallic and polymer micro components with high aspect ratios, which find application, for example, in magnetic and optical micro systems.…”