Design and fabrication of silicon-based mid infrared multi-lenses for gas sensing applications

Fonollosa, Jordi; Rubio, R.; Hartwig, S.; Marco, S.; Santander, J.; Fonseca, L.; Wöllenstein, Jürgen; Moreno, Mauricio A.

doi:10.1016/j.snb.2007.11.014

Cited by 24 publications

(12 citation statements)

References 16 publications

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“…Figure 3 depicts two different thermal isolation structures reported in the literature. The respective silicon substrates are etched either on the back side [22][23][24][25][26][27] or on the front side [28][29][30][31].…”

Section: Thermal Isolationmentioning

confidence: 99%

“…(7), the IR absorption efficiency must be high, and the thermal mass of the absorption layer must be low to achieve high sensitivity. In general, IR radiation absorbers can be divided into four groups: Thin interferometric microstructure [38], porous metal black [39], passivation thin film [33][34][35][36][37], and thick silicon layer [25][26][27].…”

Section: Infrared Absorptionmentioning

confidence: 99%

“…Flip chip packaging assembles the IR filter on top of the IR sensor by a flip chip technique [25][26][27]. The device size is considerably reduced because the metal can house is not adopted.…”

Section: Packagementioning

confidence: 99%

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MEMS-based thermoelectric infrared sensors: A review

et al. 2017

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In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part describes the physics of the device and discusses the figures of merit. The second part discusses the sensing materials, thermal isolation microstructures, absorber designs, and packaging methods for these sensors and provides examples. Moreover, the status of sensor implementation technology is examined from a historical perspective by presenting findings from the early years to the most recent findings.

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Section: Thermal Isolationmentioning

confidence: 99%

Section: Infrared Absorptionmentioning

confidence: 99%

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MEMS-based thermoelectric infrared sensors: A review

et al. 2017

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“…A multi-level zone structure can be further introduced to improve the focusing/recycling efficiency. 161 …”

Section: Lamellar Grating Based Spfmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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“…Fresnel zone plates (FZPs) are attractive as optical elements in these devices, comparing favorably to refractive lens structures due to their thin, planar shape without abandoning functionality. Microimaging systems, optical micro-electro-mechanical systems (MEMS), microsensors and photonic circuits are all possible applications that can benefit from using FZPs [1][2][3][4]. Three-dimensional (3D) volumetric phase FZPs provide flexibility for higher-order integration in novel concepts for micro devices.…”

mentioning

confidence: 99%

Multiple beam splitter using volumetric multiplexed Fresnel zone plates fabricated by ultrafast laser-writing

2012

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A simple approach to producing a 1×N beam splitter is demonstrated by fabricating a volumetric multiplex phase Fresnel zone plate in bulk transparent material. This comprised four layers of zone plates created in borosilicate glass by femtosecond laser direct-writing, each shifted laterally relative to the illumination axis, creating four separate beamlets. Since the power transmitted in each beamlet is proportional to the diffraction efficiency of the corresponding zone plate, the power ratios can be customized by adjusting the fabrication parameters of each layer. This approach demonstrates the potential of femtosecond laser direct-writing for the fabrication of complex optical elements in transparent media as components of integrated monolithic photonic devices.

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Design and fabrication of silicon-based mid infrared multi-lenses for gas sensing applications

Cited by 24 publications

References 16 publications

MEMS-based thermoelectric infrared sensors: A review

MEMS-based thermoelectric infrared sensors: A review

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Multiple beam splitter using volumetric multiplexed Fresnel zone plates fabricated by ultrafast laser-writing

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