1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) 1999
DOI: 10.1109/ultsym.1999.849484
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Design and fabrication of ultrasonic traveling wave bi-directional linear motors

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“…Rotary type traveling wave ultrasonic motors have already been commercialized and widely applied in many areas, such as optics, aeronautics, astronautics, robotics, biomedicine and precision engineering [1][2][3][4][5]. Linear ultrasonic motors [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24] also gained much attention as another type of actuators in the past. Their applications are, for instance, in precision positioning stages for MEMS machines and nanofabrication [12,13].…”
Section: Introductionmentioning
confidence: 99%
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“…Rotary type traveling wave ultrasonic motors have already been commercialized and widely applied in many areas, such as optics, aeronautics, astronautics, robotics, biomedicine and precision engineering [1][2][3][4][5]. Linear ultrasonic motors [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24] also gained much attention as another type of actuators in the past. Their applications are, for instance, in precision positioning stages for MEMS machines and nanofabrication [12,13].…”
Section: Introductionmentioning
confidence: 99%
“…Since then, many different types of L-TWUSMs have been designed and studied, i.e. [16][17][18][19][20][21][22][23][24]. Kuribayashi et al [17] investigated the excitation conditions of a L-TWUSM utilizing two Langevin transducers and a transmission bar.…”
Section: Introductionmentioning
confidence: 99%
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