Design and fabrication of zero-group-velocity Lamb wave resonator onto silicon nitride/aluminum nitride suspended membrane

Caliendo, Cinzia; Giovine, E.; Hamidullah, Muhammad

doi:10.1063/1.5047767

Cited by 4 publications

(1 citation statement)

References 7 publications

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“…Within an acoustic waveguide, there are countless acoustic modes that can propagate [49]. Each mode has its specific shape and phase velocity (v p ).…”

Section: Theoretical Backgroundmentioning

confidence: 99%

A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

Gholami

Shih

Robichaud

et al. 2022

Sensors

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This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2/gr].

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“…Within an acoustic waveguide, there are countless acoustic modes that can propagate [49]. Each mode has its specific shape and phase velocity (v p ).…”

Section: Theoretical Backgroundmentioning

confidence: 99%

A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

Gholami

Shih

Robichaud

et al. 2022

Sensors

View full text Add to dashboard Cite

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Numerical Investigation of Rayleigh, Sezawa and Love Modes in C-Axis Tilted ZNO/SI for Gas and Liquid Multimode Sensor

et al. 2019

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Finite element analysis is carried out to investigate the characteristics of Rayleigh, Sezawa and Love surface acoustic modes travelling along c-axis tilted ZnO layer on Si (001) half-space. The phase velocity dispersion curves, electromechanical coupling, reflectivity and mass loading sensitivity are studied for different electroacoustic coupling configurations and c-axis tilt angles θ. The behavior of Rayleigh and Sezawa modes operating as gas sensor, was simulated under the hypothesis that the ZnO free surface is covered with a thin polyisobutylene (PIB) film, 0.2 μm thick, able to selectively adsorb volatile gases at atmospheric pressure and room temperature. The sensor sensitivity to gas concentration in air, i.e. the frequency shifts per unit gas concentration, is studied and compared to some common materials used in literature. The obtained results, demonstrate the feasibility of high-frequency multimode micro-sensor based on the c-axis tilted ZnO piezoelectric thin film and operating in both liquid and gaseous environments.

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Investigation of modified Lamé mode resonator with high coupling coefficient

Zhou

Liu

Zou

et al. 2020

Journal of Applied Physics

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This paper presents a modified Lamé-mode resonator (MLMR) with a high, effective electromechanical coupling coefficient (Keff2). With trapezoidal grooves introduced by etching the superficial piezoelectric material between interdigitated electrodes (IDTs), the MLMR can remarkably improve Keff2, eliminate spurious modes, and reduce the internal stress of piezoelectric material. The Lamé mode resonator (LMR) with four different electrode configurations is investigated by using finite element method simulation first; then, the impact of the groove's vertical (h) and horizontal (θ) size on Keff2 and spurious modes of MLMRs is theoretically analyzed and optimized. It is noted that all the modified structures can improve Keff2 except the IDT-Ground structure. This work demonstrates a simulated Keff2 as high as 10.47% in the modified IDT-Floating structure, and 10.73% in the modified IDT-IDT structure, which is the highest ever reported in S0 mode AlN LMR. The MLMR shows great prospect for fabricating broad bandwidth filters.

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Design and fabrication of zero-group-velocity Lamb wave resonator onto silicon nitride/aluminum nitride suspended membrane

Cited by 4 publications

References 7 publications

A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

Numerical Investigation of Rayleigh, Sezawa and Love Modes in C-Axis Tilted ZNO/SI for Gas and Liquid Multimode Sensor

Investigation of modified Lamé mode resonator with high coupling coefficient

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