2013
DOI: 10.1016/j.sna.2012.10.010
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Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)

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Cited by 11 publications
(8 citation statements)
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“…35 flexible substrates in wearable sensors for health monitoring. 39 Most of the polymeric materials are soft, lightweight, RF-transparent, and low cost, and hence can address the current challenges associated with metallic and ceramic materials for implantable electronics. 40 Table 2 summarizes the list of applications of several important polymeric materials in flexible electronics.…”
Section: Materials Used For Wearable Health Care Devicesmentioning
confidence: 99%
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“…35 flexible substrates in wearable sensors for health monitoring. 39 Most of the polymeric materials are soft, lightweight, RF-transparent, and low cost, and hence can address the current challenges associated with metallic and ceramic materials for implantable electronics. 40 Table 2 summarizes the list of applications of several important polymeric materials in flexible electronics.…”
Section: Materials Used For Wearable Health Care Devicesmentioning
confidence: 99%
“…In this respect, polyurethane, PDMS, polyethylene terephthalate, Ecoflex, and polyethylene naphthalate are the most commonly used flexible substrate in wearable sensors for health monitoring. 39 As most of the wearable health sensors are in connection with human skin, utilizing biocompatible materials is a vital issue. In this area, both inorganic piezoelectric materials (e.g., zinc oxide, lead zirconate titanate, and lithium niobate) and organic ones (e.g., poly-l-lactic acid, polyvinylidene fluoride, and poly-d-lactic acid) are biocompatible.…”
Section: Materials Used For Wearable Health Care Devicesmentioning
confidence: 99%
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“…Limited by its working principle and mechanical structure, traditional linear motor is unable to meet the requirements of ultraprecision and high precision. Then, a variety of linear actuators, using new functional materials' physical effect, arise at the historic moment, which includes magnetostrictive actuator, electrostrictive actuator, electrostatic actuator, electrorheological actuator, 4 shape memory alloy actuator, piezoelectric actuator, and so on.…”
Section: Introductionmentioning
confidence: 99%
“…Among the challenges encountered in MOEMS when aiming for increased functionality is the local displacement. Nowadays commonly used micro-actuators are either electrostatic [6] or thermal [7]. There is, however, a growing use of piezoelectric actuators in MOEMS due to their better understanding, also to the new developments regarding hysteresis reduction and the emergence of new improved materials.…”
Section: Introductionmentioning
confidence: 99%