Design and implementation of hollow cilium cylinder MEMS vector hydrophone

Yang, Xi; Xu, Qingda; Zhang, Guojun; Zhang, Lansheng; Wang, Weidong; Shang, Zhengguo; Shi, Yunbo; Li, Chenge; Wang, Renxin; Zhang, Wendong

doi:10.1016/j.measurement.2020.108309

Cited by 18 publications

(5 citation statements)

References 22 publications

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“…To investigate the performance of the PVH for vector hydrophone, which was encapsulated inside the polyurethane waterproof cap of the vector hydrophone [ 35 ], the standard wave tube calibration system was used to measure the sensitivity and directionality of the vector hydrophone [ 36 ], as shown in Figure 14 . The standing wave tube measurement site is shown in Figure 14 a.…”

Section: Fabrication and Testingmentioning

confidence: 99%

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High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

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Section: Fabrication and Testingmentioning

confidence: 99%

Section: Performance Of the Mems Hydrophonementioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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“…As an important acoustic sensor, hydrophones have a wide range of applications in the fields of marine resource exploration, underwater acoustic communication, data transmission, marine environment monitoring and underwater target recognition (Ferguson and Speechley, 2009). Scalar hydrophones need to be multiple for positioning, which leads to high cost and complex operation (Shang et al , 2020; Yang et al , 2021). The sound field has both sound pressure and vibration velocity, and the traditional vector hydrophone can estimate the azimuth angle of the target sound source according to this characteristic.…”

Section: Introductionmentioning

confidence: 99%

Improved DOA estimation of MEMS vector hydrophone combined with CEEMDAN and wavelet transform for noise reduction

Chang,

Zhang,

Zhang

et al. 2024

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Purpose Ciliated microelectromechanical system (MEMS) vector hydrophones pick up sound signals through Wheatstone bridge in cross beam-ciliated microstructures to achieve information transmission. This paper aims to overcome the complexity and variability of the marine environment and achieve accurate location of targets. In this paper, a new method for ocean noise denoising based on improved complete ensemble empirical mode decomposition with adaptive noise combined with wavelet threshold processing method (CEEMDAN-WT) is proposed. Design/methodology/approach Based on the CEEMDAN-WT method, the signal is decomposed into different intrinsic mode functions (IMFs), and relevant parameters are selected to obtain IMF denoised signals through WT method for the noisy mode components with low sample entropy. The final pure signal is obtained by reconstructing the unprocessed mode components and the denoising component, effectively separating the signal from the wave interference. Findings The three methods of empirical mode decomposition (EMD), ensemble empirical mode decomposition (EEMD) and CEEMDAN are compared and analyzed by simulation. The simulation results show that the CEEMDAN method has higher signal-to-noise ratio and smaller reconstruction error than EMD and EEMD. The feasibility and practicability of the combined denoising method are verified by indoor and outdoor experiments, and the underwater acoustic experiment data after processing are combined beams. The problem of blurry left and right sides is solved, and the high precision orientation of the target is realized. Originality/value This algorithm provides a theoretical basis for MEMS hydrophones to achieve accurate target positioning in the ocean, and can be applied to the hardware design of sonobuoys, which is widely used in various underwater acoustic work.

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“…Although these two structures, respectively, improved the sensitivity of the hydrophones, it greatly reduced their working bandwidth. The sensitivity of the hydrophone has been also improved by replacing the previous cylinder structure with five different new structures, which are, respectively, the cup-shaped MEMS vector hydrophone designed by Xu et al [17], the two-component cilia cylinder MEMS vector hydrophone proposed by Xu et al [18], the cilia cluster MEMS vector hydrophone developed by Zhang et al [19], the dumbbell-shaped ciliary MEMS vector hydrophone reported by Ji et al [20], and the hollow cilium cylinder vec-tor hydrophone presented by Yang et al [21]. However, they increased varying degrees of the difficulty of the hydrophone fabricating process and reduced the consistency of the hydrophone production.…”

Section: Introductionmentioning

confidence: 99%

“…However, they increased varying degrees of the difficulty of the hydrophone fabricating process and reduced the consistency of the hydrophone production. And, in reference [21], they did not take into account that the hollow cilium cylinder structure is prone to bubble forming, which has destructive effects on the performance of the hydrophone. Furthermore, all of the above studies only improved the sensitivity of MEMS hydrophones by changing the cylinder structure or four-beam microstructure alone, without optimizing and improving both.…”

Section: Introductionmentioning

confidence: 99%

Research on “Cylinder‐Four‐Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

et al. 2021

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The existing MEMS bionic vector hydrophone has the problems of low-sensitivity and narrow-working band, and the sensitivity and working bandwidth cannot be improved simultaneously by changing the single microstructural parameter. In this paper, the MEMS bionic vector hydrophone microstructural parameters (length, width and height of cantilever, side length of the center block, height and radius of the rigid cylinder) have been optimized simultaneously to obtain a higher sensitivity at the almost same working bandwidth. Firstly, through the mechanical analysis of the microstructure, the objective function and feasible region are established to optimize the parameters of the microstructure, and a set of optimized parameters is obtained. Secondly, the optimized structure is verified by ANSYS simulation, and then, the optimized four-beam structure is fabricated by the MEMS manufacturing technology. Finally, these two kinds of hydrophones (the previous one and the optimized one) are produced, and their performance tests are carried out. The testing results show that the performances of the optimized hydrophone have been greatly improved, exhibiting a receiving sensitivity of −181.2 dB@1 kHz (increasing by 6.5 dB, 0 dB reference 1 V/μ Pa), the frequency response ranging from 20 Hz to 1 kHz which is the same working bandwidth as before, and a good dipole directivity. The optimization researches in this paper provide a method and idea for the performance improvement of the following MEMS vector hydrophone.

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Design and implementation of hollow cilium cylinder MEMS vector hydrophone

Cited by 18 publications

References 22 publications

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Improved DOA estimation of MEMS vector hydrophone combined with CEEMDAN and wavelet transform for noise reduction

Research on “Cylinder‐Four‐Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

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