2022
DOI: 10.1063/5.0067483
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Design and integrated stroke sensing of a high-response piezoelectric direct-drive valve enhanced by push–pull compliant mechanisms

Abstract: Enhancing the dynamic bandwidth of flow control valves based on piezoelectric actuators has attracted much attention in the field of precision fluid control. This paper reports a high-speed piezoelectric direct-drive flow control valve with an enhanced flow rate by introducing a new push–pull complementary compliant mechanism. An improved semi-rhombus compliant amplifying mechanism is designed to amplify the microstroke of piezo-stacks with an enhanced resonance frequency. To facilitate the design, the dynamic… Show more

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Cited by 7 publications
(2 citation statements)
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“…It is well known that compliant mechanisms offer nonassembled structure, zero friction, and simple manufacture which are advantages to overcome the limitations of rigid-counterparts in precise mechanical engineering. In the last decade, flexure hinge-based compliant mechanisms have been widely utilized for precise engineering and fine positioner with compact sizes such as a positioner [ 7 , 8 ] and valve [ 6 , 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…It is well known that compliant mechanisms offer nonassembled structure, zero friction, and simple manufacture which are advantages to overcome the limitations of rigid-counterparts in precise mechanical engineering. In the last decade, flexure hinge-based compliant mechanisms have been widely utilized for precise engineering and fine positioner with compact sizes such as a positioner [ 7 , 8 ] and valve [ 6 , 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, the stroke of a piezoelectric actuator is often small. In order to obtain the larger working travels, the previous stage was integrated with displacement amplifiers [26]. An effective design of a 3-DOF positioner with a lever amplifier type was well developed [7].…”
Section: Introductionmentioning
confidence: 99%