“…ntegrated optical circuits realized on silicon-on-insulator (SOI) wafers consisting of channel waveguides with silicon (Si) core and silica (SiO 2 ) cladding are promising platform to integrate various optical waveguide devices, such as optical switches, [1][2][3] optical resonators, [4][5][6][7][8] optical directional couplers, [9][10][11] polarization splitters, 12,13) and grating couplers, [14][15][16][17][18] with extremely small size. However, different from multi-layer electrical interconnections used in complementary metal oxide semiconductor (CMOS) integrated circuits, single-layer optical interconnections with channel waveguides are required in standard planer optical circuits.…”