Design and investigation on a piezoelectric screw pump with high flowrate

Qing, Pan; Li, Yinghao; Wang, Xiaoliang; Jiang, Haiyang; Wang, Quan; Huang, Ziliang; Zhang, Yong

doi:10.1088/1361-665x/ac0859

Cited by 7 publications

(5 citation statements)

References 36 publications

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“…In 2020, Zhang et al [88] studied the magnified effect of the leveraged, bridge, and hydraulic mechanisms driven by piezoelectric stack. In 2021, Pan et al [164] introduced a pump driven by piezoelectric stack and ring hinge, also, a threaded pipe and screw are designed as the pump body.…”

Section: Pump With Innovative Structurementioning

confidence: 99%

Recent trends in structures and applications of valveless piezoelectric pump—a review

et al. 2022

J. Micromech. Microeng.

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Piezoelectric actuator-driven valveless pump has been studied for a long time in theory and structure for the features of high precision, fast response, low power consumption, compact size, reliability for long-term use and high performance. The pump has a remarkable significance for drug delivery, biological application, chemical analysis, high precision gluing, solder paste, lubrication system and electronic chip cooling system, etc. However, a higher requirement on the control circuit and power supply for the pump is raised, also, the driving voltage of the pump should be further reduced. In this review, the piezoelectric pump with and without valve is analysed in working principle. Then, the recent trends of valveless pump in different structures are discussed. The representative structural designs in different thinking are introduced in the working media, driven voltage, frequency, flow rate, pressure, and the efficiency of the pump, the performance of different pumps are also compared. Afterwards, the application of the pump for different purposes with featured structures are presented. Next are the limitations and the outlook of the pump, which provides some potential research points for subsequent studies, and ended with a summary. This review concludes the recent trends of valveless piezoelectric pump in structural and application, attempts to guide the researchers with different professional backgrounds that can solve current problems through cross-disciplinary approaches.

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Section: Pump With Innovative Structurementioning

confidence: 99%

Recent trends in structures and applications of valveless piezoelectric pump—a review

et al. 2022

J. Micromech. Microeng.

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“…When the driving voltage was 100 V pp , the output pressure was 3.11 kPa. Pan et al [15] proposed a type of piezoelectric screw pump, which could reach an output pressure of 5.3 kPa driven by 600 V pp . However, the output pressure of these piezoelectric valveless pumps was generally not high.…”

Section: Introductionmentioning

confidence: 99%

Design and investigation of a resonant piezoelectric pump with high output pressure using a displacement-amplifying vibrator

Qing

Diao

et al. 2022

Smart Mater. Struct.

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A resonant piezoelectric pump using a displacement-amplifying vibrator is proposed in this paper to improve the output pressure of the piezoelectric pump. The piezoelectric pump is composed of a displacement-amplifying vibrator and a pump body. The displacement-amplifying vibrator consists of two amplifiers and two piezoelectric stacks. The pump body comprises a piston shaft, an orifice plate, a valve body, check valves and a runner plate. A clearance exists between the piston shaft and the orifice plate. A groove is designed on the piston shaft, and the pump body is sealed by an O-ring. The displacement-amplifying vibrator works in the resonant state, which has a large output amplitude. In this paper, the working principle of the piezoelectric pump is introduced and the influencing factors of output pressure of the piezoelectric pump are theoretically analyzed. The resonant frequency and stiffness of check valves with different thicknesses are simulated and compared, and three displacement amplifiers are designed and simulated. Prototypes of piezoelectric pump are made, and the effect of valve thickness, the diameter of piston shaft, and the displacement-amplifying vibrator is experimentally investigated. The experimental results show that the piezoelectric pump prototype with displacement-amplifying vibrator 3, 10 mm piston shaft and 0.05 mm-thick check valve has the maximum output pressure. Under the driving voltage of 500 Vpp, the maximum output pressure is 4.73 MPa, and the maximum flowrate is 65.7 ml min−1.

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“…Solano-Arana et al [17] proposed a pumping micromixers with two inlets and one outlet by using a novel application of dielectric stack actuators to provide driving force for fluid flowing and the results show that the micromixer was able to mix two solutions with a flow rate of 21.5 µL min −1 at outlet. Due to the inverse piezoelectric effect of piezoelectric ceramics, piezoelectric micropump has the characteristics of compact structure, high reliability and stable operation to make it become the most popular research direction of micropumps [18][19][20][21][22]. According to structure, piezoelectric micropump can be divided into valveless piezoelectric micropump, piezoelectric micropump with passive valves and piezoelectric micropump with active valves [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

Peng¹,

Wang²

2022

Smart Mater. Struct.

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In order to only use one piezoelectric micropump to simultaneously drive and control multi-channel flow fluids of complex microfluidic systems in biological, chemical and medical applications, and then improve the integration and reduce the size of systems, principle and structure of a multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array are proposed and realized. The micropump is composed of one pumping unit and four active piezoelectric valves with annular boundaries, which form active piezoelectric valve array by uniformly distributing around pumping unit. All valves are connected to pumping unit by corresponding fluid channels and they can realize bidirectional fluid flowing. Therefore, pump can suck fluid from any one or more valves through pumping unit and can discharge fluid to the other one or more valves, which form its six working modes. Silicon-based pump body is processed by photoetching and the micropump is fabricated by fixing circular piezoelectric unimorph actuators on the silicon-based pump body. Flow rate model is established, the flow characteristics under each working mode are experimentally tested. Results show that the micropump can realize simultaneously multi-channel fluid input and output, when it works under three-in and single-out, it has the maximum flow rate and output pressure; the flow rate model can predict its flow rate, the maximum relative error between experimental test result and numerical simulation result is 9.99%; the micropump has high flow control accuracy, when amplitude of driving voltage varies from 35 V to 36 V with step of 0.1 V, it has the minimum change of flow rate of 1 μL/min, the maximum flow rate deviation of 5 μL/min and the maximum relative standard deviation of flow rate control of 0.175%. Therefore, the micropump provide feasible scheme for piezoelectric micropumps to be applied in complex microfluidic systems with multi-channel flow fluids, such as lab-on-chip.

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Design and investigation on a piezoelectric screw pump with high flowrate

Cited by 7 publications

References 36 publications

Recent trends in structures and applications of valveless piezoelectric pump—a review

Recent trends in structures and applications of valveless piezoelectric pump—a review

Design and investigation of a resonant piezoelectric pump with high output pressure using a displacement-amplifying vibrator

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

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