Design and modeling of a novel monolithic parallel XY stage with centimeters travel range

Abstract

Since most of XY positioning stages with large travel range proposed by former researchers suffer from loose structure and low out-of-plane payload, this article presents a novel monolithic parallel XY stage based on spatial prismaticprismatic joints with centimeters travel range, compact size, and high out-of-plane payload capacity. The novel parallel linear compliant mechanism of the stage is composed of four spatial prismatic-prismatic joints, which is two compound leaf spring parallelograms serially connected in cubical space to obtain large travel, compact size, and high out-of-plane payload capacity simultaneously. The theoretical static stiffness and resonant frequencies are obtained by matrix structural analysis. As a case study, a reified stage is presented and discussed in detail. Finally, theoretical models are comprehensively compared with finite element analysis models. It is shown that the stage in the case study has the following merits: large travel range up to 20 3 20 mm 2 , high-area ratio of workspace to the outer dimension of the stage about 2.26%, well-constrained cross-axis coupling motion less than 1.5 mm at the full primary motion, acceptable resonant frequencies of the two translational axes about 34 Hz, and large out-of-plane payload capacity more than 24 kg.

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

“…The details of the derivation are already shown in Liu et al (2017). The relationship of the displacement δ s at the center of the platform and the external force F e as well as the actuator forces F ai is:…”

“…According to Liu et al (2017), the displacement δ asi of the ith leg at the actuator point caused by the external force F e is…”

Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform

“…The reason lies in that the serial-kinematic category has a simple structure with an easy control strategy, as the 2-DOF movements can be handled separately. As the demand of accuracy becomes higher, parallel-kinematic structure has attracted more attention from researchers, as it provides lower inertia, smaller cumulative error, and higher resonant frequency [15,16]. With the moving platform directly connected by multiple limbs, the parallel-kinematic structure can achieve identical dynamic behavior in the two directions.…”

“…With the moving platform directly connected by multiple limbs, the parallel-kinematic structure can achieve identical dynamic behavior in the two directions. Concerning the actuation aspect, the voice coil motor (VCM) is widely used for driving micropositioning stages, because it can provide large linear stroke, large acceleration, and infinitesimal resolution compared with the piezoelectric actuator (PZT) [15][16][17][18]. Therefore, the VCM is capable of delivering a centimeter-level stroke along with a high resolution.…”

“…It combines the compactness and advantages of parallel-kinematic structure well, but the motion stroke is limited by its piezoelectric actuator. Liu et al [15] placed the MCPFs on the z-axis rather than on the xy plane, making it more compact on the xy plane with less extra structures. However, as the special structure limits the selection of VCMs, a complex driving program and analytical modeling need to be solved to adapt the special structure.…”