Design and modeling of a frog-shape MEMS capacitive microphone using SOI technology

Sedaghat, Sedighe Babaei; Ganji, Bahram Azizollah; Ansari, R.

doi:10.1007/s00542-017-3461-2

Cited by 6 publications

(7 citation statements)

References 13 publications

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“…The constant value of the electrostatic spring caused by the bias voltage is obtained from the following equation [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

“…In equation 44, Aeff is the effective area of the diaphragm and Vb is the microphone bias voltage. The final spring constant is equal to the difference between the spring constant of the arms and the electrostatic spring constant [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

“…By inserting equation 45 into the equation below, the resonance frequency of the microphone is calculated [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

“…By inserting equation 45 into equation 47, the microphone pull-in voltage is calculated: Using equations 48 and 43, the mechanical sensitivity of the microphone is expressed as follows [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

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A Novel High Performance MEMS Capacitive Microphone

Habibi,

Ganji,

Jafari-Talookolaei

2024

Preprint

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In applications related to audio, such as hearing aids, mobile phones, and audio sensors, a microphone with high sensitivity, low voltage, and linear performance is required. This article analyzes, designs, and simulates a new structure of a MEMS condenser microphone. The microphone uses four spiral arms, with one side fixed and the other connected to a support rod that transfers the diaphragm displacement to the arms. The square diaphragm is suspended in the air by the rod, and its entire area moves without bending and parallels to the fixed plate, utilizing its total area in an optimal way. By increasing the mechanical sensitivity and decreasing the electrical sensitivity, the proposed microphone reduces the bias voltage and utilizes the maximum air gap between the capacitor plates, resulting in almost linear diaphragm displacement. A free-body diagram was used to analyze the diaphragm structure, and the spring constant, pull-in voltage, sensitivity, and resonance frequency equations were calculated. The proposed microphone was simulated using Intellisuite software, and the simulation and analysis results had very high accuracy. The aluminum diaphragm had dimensions of 250×250 μm 2 , and the air gap was 1um. The diaphragm dimensions were reduced by 20%, and its pull-in voltage was reduced by 18% compared with previous work, while the microphone sensitivity was increased. The proposed microphone can also be used at a very low voltage of 0.1V. The open circuit sensitivity of the microphone at voltages of 0.1 is 15.8 nm/Pa, respectively.

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“…The constant value of the electrostatic spring caused by the bias voltage is obtained from the following equation [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

“…By inserting equation 45 into the equation below, the resonance frequency of the microphone is calculated [17].…”

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

Section: Fig 3 Free-body Diagram Of One Of the Spiral Arms Of The Dia...mentioning

confidence: 99%

See 2 more Smart Citations

A Novel High Performance MEMS Capacitive Microphone

Habibi,

Ganji,

Jafari-Talookolaei

2024

Preprint

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“…However, new designs presenting technological advances have been proposed recently in the literature, such as a microphone with moving microbeam [ 12 ], or transducers (sources and microphones) with perforated moving electrodes. The mean motivation for the work presented herein is the latter case with electrodes in the form of elastic perforated plates clamped at all boundaries [ 13 ] or rigid elastically supported perforated plates [ 14 , 15 , 16 , 17 ]. Although these experimental studies contain approximate theoretical models, mainly based on the lumped elements approach, the precise analytical modeling is still of high interest.…”

Section: Introductionmentioning

confidence: 99%

Modeling of MEMS Transducers with Perforated Moving Electrodes

Simonova

Honzík

2023

Micromachines

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Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results.

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