Design and Modeling of a High-Speed AFM-Scanner

Schitter, Georg; Åström, Karl Johan; DeMartini, Barry E.; Thurner, Philipp J.; Turner, Kimberly L.; Hansma, Paul K.

doi:10.1109/tcst.2007.902953

Cited by 346 publications

(176 citation statements)

References 32 publications

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“…Die maximale Auflösung und Messrate wird, abgesehen von den Limitierungen des eigentlichen Messsystems, maßgeblich von der Auflösung und der Bandbreite des Scanners bestimmt. Typischerweise werden Piezo- [16] oder elektromagnetische Aktuatoren [15,26], welche die Aktuationskraft, Scanbereich und -geschwindigkeit bestimmen und Sensoren zur Positionsmessung verwendet. Die Integration der Aktoren, Sensoren und der mechanischen Struktur des Scanners ist dabei maßgeblich für die Performanz die mit einer Regelstruktur zur Positionsregelung erzielt werden kann [15].…”

Section: Messplattform Für Die In-prozess-messtechnikunclassified

“…Die Kombination von integrierten hochperformanten mechatronischen Systemen und Bewegungssteuerung -beides grundlegende Technologien für bildgebende Systeme und Messsysteme aus dem Hightech-Segment [14,15] -sowie optischer Komponenten, bildet, unter systematischer Berücksichtigung wechselseitiger Beziehungen und Einflüsse, den Ausgangspunkt für diesen Entwurfsansatz. Resultate eines solchen integrierten Entwurfsansatzes sind hochperformante bildgebende mechatronische Systeme wie Rasterkraftmikroskope (AFM) [16], konfokale Laser-Scanning-Mikroskope [17] oder Adaptive Optische Systeme [18].…”

Section: Introductionunclassified

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Hochpräzise roboterbasierte 3D-In-Prozess-Messtechnik

Csencsics

Ito

Schlarp

et al. 2018

Elektrotech. Inftech.

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Section: Messplattform Für Die In-prozess-messtechnikunclassified

Section: Introductionunclassified

Hochpräzise roboterbasierte 3D-In-Prozess-Messtechnik

Csencsics

Ito

Schlarp

et al. 2018

Elektrotech. Inftech.

Self Cite

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“…They can provide smooth motions through deflections of flexure hinges Handley et al, 2004). Due to these advantages, coupled with nanometer positioning accuracy, flexure-based compliant mechanisms have been widely used in many industrial applications, such as scanning probe microscopy (Schitter et al, 2007;Leang and Fleming, 2009), lithography (Choi and Lee, 2005), nano-manipulation and manufacturing (Lai et al, 2012;Verma et al, 2005), and biological science (Ando et al, 2002;Kim et al, 2012). In addition, the flexure-based compliant positioning mechanisms with ultrahigh precision play more and more important roles in applications where a high resolution motion is desirable, such as the MEMS sensors and actuators, optical fiber alignment, and biological cell manipulation (Wang and Zhang, 2008;Li et al, 2012;Zubir et al, 2009).…”

Section: Introductionmentioning

confidence: 99%

Output decoupling property of planar flexure-based compliant mechanisms with symmetric configuration

Jiang

et al. 2016

Mech. Sci.

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Abstract. This paper presents the output decoupling property of planar flexure-based compliant mechanisms with symmetric configuration. Compliance/stiffness modeling methods for flexure serial structures and flexure parallel structures are first derived according to the matrix method. Analytical model of mechanisms with symmetric configuration is then developed to analyze the output decoupling property. The proposed analytical model shows that mechanisms are output decoupled when they are symmetry about two perpendicular axes or when they are composed of either three or an even number of identical fundamental forms distributed evenly around the center. Finally, output compliances of RRR and 4-RRR compliant micro-motion stages are derived from the analytical model and finite element analysis (FEA). The comparisons indicate that the results obtained from the proposed analytical model are in good agreement with those derived from FEA, which validates the proposed analytical model.

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“…A common approach to avoid scan-induced vibrations during video-rate imaging is to use a high-bandwidth flexurebased nanopositioner, with the first lateral resonant peak above 20 kHz [21], [22]. However, designing such a high-bandwidth nanopositioner could be a difficult task.…”

Section: Introductionmentioning

confidence: 99%

Video-Rate Lissajous-Scan Atomic Force Microscopy

Yong

Bazaei

Moheimani

2014

IEEE Trans. Nanotechnology

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Abstract-Raster scanning is common in atomic force microscopy (AFM). The nonsmooth raster waveform contains highfrequency content that can excite mechanical resonances of an AFM nanopositioner during a fast scan, causing severe distortions in the resulting image. The mainstream approach to avoid scan-induced vibrations in video-rate AFM is to employ a highbandwidth nanopositioner with the first lateral resonance frequency above 20 kHz. In this paper, video-rate scanning on a nanopositioner with 11.3-kHz resonance frequency is reported using a smooth Lissajous scan pattern. The Lissajous trajectory is constructed by tracking two sinusoidal waveforms on the lateral axes of the nanopositioner. By combining an analog integral resonant controller (IRC) with an internal model controller, 1-and 2-kHz single tone set-points were successfully tracked. Highquality time lapsed AFM images of a calibration grating recorded at 9 and 18 frames/s without noticeable image distortions are reported.Index Terms-Atomic force microscopy, flexure-based, integral resonant control, internal model control, Lissajous-scan, nonraster scanning, video-rate.

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Design and Modeling of a High-Speed AFM-Scanner

Cited by 346 publications

References 32 publications

Hochpräzise roboterbasierte 3D-In-Prozess-Messtechnik

Hochpräzise roboterbasierte 3D-In-Prozess-Messtechnik

Output decoupling property of planar flexure-based compliant mechanisms with symmetric configuration

Video-Rate Lissajous-Scan Atomic Force Microscopy

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