Design and modeling of a microwave plasma enhanced chemical vapor deposition system

The main design options for supplying SHF energy to the end wall of a cylindrical resonator were considered. 2 types of designs for coaxial feed of energy were selected and optimized, differing in the location of the coaxial line relative to the required direction of wave propagation. As a result of the calculations, the electric fields inside the cylindrical chamber and in the horn coaxial antennas were found, and the SWR of the systems was determined. A comparison in distribution of the electric field when metal objects were placed in the chamber was carried out. The areas of occurrence of a plasma SHF discharge on the surface of a cylindrical object were shown.

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Design and modeling of a microwave plasma enhanced chemical vapor deposition system

Cited by 2 publications

References 3 publications

A Study of the Electric Field Density Distribution in Cylindrical Chamber with a Coaxial Feed of Super High-Frequency Radiation Energy

A Study of the Electric Field Density Distribution in Cylindrical Chamber with a Coaxial Feed of Super High-Frequency Radiation Energy

Study of the electric field density distribution in cylindrical chamber with coaxial feed of super high frequency radiation energy

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