Design and Operation of Adsorptive Honeycomb Rotor VOC Concentrators and Improvement of Performance by High Temperature Regeneration

Development and Field-Scale Optimization of a Honeycomb Zeolite Rotor Concentrator/Recuperative Oxidizer for the Abatement of Volatile Organic Carbons from Semiconductor Industry

“…Due to the low concentrated exhaust gas, oxidation requires additional energy which is not to be ignored. Consequently, a combined concentrator/oxidizer system has been proposed as an effective physical-chemical option and proven to be a viable solution that enables VOC emitters to comply with the regulations all over the world. , Combining the concentrator with oxidation processes shows that it is more economical, efficient, and yields fewer secondary emissions as compared with the single oxidation processes such as the regenerative thermal oxidizer, regenerative catalytic oxidizer, or catalytic thermal oxidizer processes . For a combined system, the concentrator removes the VOCs from the exhaust air and an oxidizer then mineralizes the concentrated stream of the VOCs emitted from the concentrator.…”

“…Some research has been performed to explore the removal of VOCs using rotor concentrator alone, ,, however observations and research generally are not available on a sufficient large scale to show the potential for optimization of a combined concentrator/oxidizer system, despite the many studies which have been conducted on removal efficiency and reaction product mineralogies of the concentrator/oxidizer systems. Therefore, the design and control of the major parameters that govern the concentrator/oxidizer frequently raise problems in meeting the required removal of an exhaust gas treatment system, which include the type of absorbent, air flow rate, rotating speed, regeneration temperature, the area ratio of process/cooling/regeneration zone, the flow rate ratio of the process flow to the regeneration flow, and VOC concentrations.…”