Design And Optimization of Integrated Mach_ Zehnder Modulators In X-Cut Lithium Niobate Thin Film

Abstract

The Mach-Zehnder electro-optic modulator (MZM) was designed and fabricated using the AFM COMSOL program and the pulse laser deposition (PLD) technique. The PLD technique was used to deposit silicon, silicon oxide and LN thin film. Previously estimated optical properties of the prepared films were employed in the theoretical design of the modulator. Optimum device parameters were obtained, which delivered a considerable figure of merit (Vπ.L) values within the range of 2.12 to 2.25 at a device length of 2 cm.