Abstract-In this paper we introduce a novel power management architecture for 3D Through Silicon Vias based integration technology. Our approach relies on the synergy of two new technological developments as follows: (i) we utilize a NanoElectroMechanical (NEM) device, the Suspended Gate FET (SG-FET), as sleep transistor; and (ii) we make use of the 3D potential by placing the sleep transistor (the entire power management infrastructure) on a dedicated tier of the 3D stacked Integrated Circuit. Due to the extreme low leakage current of the SG-FET our proposal results in 2 orders of magnitude static power reduction, when compared with equivalent counterparts based on traditional CMOS devices. The SG-FET power switch requires about 4x more area when compared to bulk CMOS, however, due to the 3D integration which allows for heterogeneous dies to be stacked, the power gating devices can be placed to a low cost dedicated layer, which also results in a substantial IR-drop reduction with minimum impact on leakage.