2023
DOI: 10.11591/ijece.v13i4.pp3788-3795
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Design and performance analysis of front and back Pi 6 nm gate with high K dielectric passivated high electron mobility transistor

Abstract: Advanced high electron mobility transistor (HEMT) with dual front gate, back gate with silicon nitride/aluminum oxide (Si3N4/Al2O3) as passivation layer, has been designed. The dependency on DC characteristics and radio frequency characteristics due to GaN cap layers, multi gate (FG and BG), and high K dielectric material is established. Further compared single gate (SG) passivated HEMT, double gate (DG) passivated HEMT, double gate triple (DGT) tooth passivated HEMT, high K dielectric front Pi gate (FG) and b… Show more

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