2018
DOI: 10.1177/1687814018767194
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Design and performance evaluation of an exponentially weighted moving average–based adaptive control for piezo-driven motion platform

Abstract: In this article, building a controlled system with velocity feedback in the inner loop for a platform driven by piezoelectric motors is investigated. Such a motion control system is subject to disturbance such as friction, preload, and temperature rise in operation. Especially, temperature rise is an essential problem of using piezoelectric motor, but very few research works address this topic in depth. Exponentially weighted moving average method has been widely used in process control to deal with systematic… Show more

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“…High-precision micro-nanoscale positioning is an important condition for 3D morphology reconstruction by SICM. In order to achieve this goal, nanoscale high-precision control of the piezoelectric ceramic actuator is required [8]. However, the hysteresis of piezoelectric materials results in a nonlinear relationship between the input voltage and output displacement, which seriously affects the positioning accuracy, and leads to the distortion of the scanned image of the samples.…”
Section: Introductionmentioning
confidence: 99%
“…High-precision micro-nanoscale positioning is an important condition for 3D morphology reconstruction by SICM. In order to achieve this goal, nanoscale high-precision control of the piezoelectric ceramic actuator is required [8]. However, the hysteresis of piezoelectric materials results in a nonlinear relationship between the input voltage and output displacement, which seriously affects the positioning accuracy, and leads to the distortion of the scanned image of the samples.…”
Section: Introductionmentioning
confidence: 99%