Semiconductor
ultramicroelectrodes (SUMEs) were prepared by photolithographic
patterning of defined pinholes in dielectric coatings on semiconductor
wafers. Methods are reported for interpreting their electrochemical
response characteristics in the absence of illumination. Radial diffusion
is reconciled with the diode equation to describe the full voltammetric
response, allowing direct determination of heterogeneous charge-transfer
rate constants and surface quality. The voltammetric responses of
n-type Si SUMEs were assessed and showed prototypical UME characteristics
with obtainable current densities higher than those of conventional
macroscopic electrodes. The SUME voltammetry proved highly sensitive
to both native and intentionally grown oxides, highlighting their
ability to precisely track dynamic surface conditions reliably through
electrochemical measurement. Subsequently, electron transfer from
the conduction band of n-Si SUMEs to aqueous Ru(NH3)6
3+ was determined to occur near optimal exoergicity.
In total, this work validates the SUME platform as a new tool to study
fundamental charge-transfer properties at semiconductor/liquid junctions.