2016
DOI: 10.3390/mi7010002
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Design and Performance of a Focus-Detection System for Use in Laser Micromachining

Abstract: We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the s… Show more

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Cited by 21 publications
(3 citation statements)
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“…Various optical sensing methods have been reported to measure workpiece distance along the optical axis in real-time. Techniques involving monitoring of the laser spot diameter using image sensors have also been developed [161,162], but may not perform well on irregular surfaces, defocusing direction may remain ambiguous, and marking the specimen by firing the machine beam in order to make a spot measurement may cause unwanted damage to the target. Hand et al developed a technique that redirected a fraction of the process-generated light into a separate optical path for analysis of the chromatic aberrations to determine focal error [163].…”
Section: Introductionmentioning
confidence: 99%
“…Various optical sensing methods have been reported to measure workpiece distance along the optical axis in real-time. Techniques involving monitoring of the laser spot diameter using image sensors have also been developed [161,162], but may not perform well on irregular surfaces, defocusing direction may remain ambiguous, and marking the specimen by firing the machine beam in order to make a spot measurement may cause unwanted damage to the target. Hand et al developed a technique that redirected a fraction of the process-generated light into a separate optical path for analysis of the chromatic aberrations to determine focal error [163].…”
Section: Introductionmentioning
confidence: 99%
“…Various optical sensing methods have been reported to measure workpiece distance along the optical axis in real-time. Techniques involving monitoring of the laser spot diameter using image sensors have also been developed 2,3 but may not perform well on irregular surfaces, defocusing direction may remain ambiguous, and marking the specimen by firing the machine beam in order to make a spot measurement may cause unwanted damage to the target. Hand et al 4 developed a technique that redirected a fraction of the process-generated light into a separate optical path for analysis of the chromatic aberrations to determine focal error.…”
Section: Introductionmentioning
confidence: 99%
“…More importantly, some other studies have already improved the optical setup to explore the focus on a non-planar sample based on diffractive beam samplers [ 12 , 13 ] or the macro/micro dual-drive principle [ 14 ]. Furthermore, many auto-focusing devices have been developed for laser direct writing [ 14 , 15 , 16 ]; laser ablation [ 17 ]; automatic microscopy and measurement [ 18 ]; laser material processing [ 19 ]; two-photon photo-polymerization (TPP)-based micro-fabrication [ 20 ]; and several other applications [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 ] in Shack-Hartmann wave-front sensor fabrication [ 21 ], parallel data processing [ 22 ], photonic force microscopy [ 23 ], controllable mirror-lens retrofocus objective [ 24 ], tunable lens focal offset measurement [ 25 ], laser micromachining [ 26 ], remote sensing [ 27 ], automated optical inspection [ 28 ], auto-focusing infinity corrected microscopes [ 29 ], and direct imaging technology [ 30 ] with detailed theoretical models. However, these focus detection systems are complicated, expensive, and inadequate for the mass production of 3D patterns [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 ].…”
Section: Introductionmentioning
confidence: 99%