Design and performance of an ultra-high-resolution 300 kV microscope

Bakker, H.; Bleeker, Arno J.; Mul, P.M.

doi:10.1016/0304-3991(96)00026-5

Cited by 18 publications

(7 citation statements)

References 8 publications

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“…The achievable information limit was measured in the so called Young's fringes test on a gold layer that was sputtered on top of the MEMS chip: Young's fringes are produced in a diffractogram of two superimposed images of the same sample area acquired under the same conditions and that have been shifted (image shift) over a small distance (Bakker et al, ).…”

Section: Resultsmentioning

confidence: 99%

A MEMS‐based heating holder for the direct imaging of simultaneous in‐situ heating and biasing experiments in scanning/transmission electron microscopes

Mele¹,

Konings²,

Dona³

et al. 2016

Microscopy Res & Technique

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The introduction of scanning/transmission electron microscopes (S/TEM) with sub-Angstrom resolution as well as fast and sensitive detection solutions support direct observation of dynamic phenomena in-situ at the atomic scale. Thereby, in-situ specimen holders play a crucial role: accurate control of the applied in-situ stimulus on the nanostructure combined with the overall system stability to assure atomic resolution are paramount for a successful in-situ S/ TEM experiment. For those reasons, MEMS-based TEM sample holders are becoming one of the preferred choices, also enabling a high precision in measurements of the in-situ parameter for more reproducible data. A newly developed MEMS-based microheater is presented in combination with the new NanoEx TM -i/v TEM sample holder. The concept is built on a four-point probe temperature measurement approach allowing active, accurate local temperature control as well as calorimetry. In this paper, it is shown that it provides high temperature stability up to 1,3008C with a peak temperature of 1,5008C (also working accurately in gaseous environments), high temperature measurement accuracy (<4%) and uniform temperature distribution over the heated specimen area (<1%), enabling not only in-situ S/TEM imaging experiments, but also elemental mapping at elevated temperatures using energy-dispersive X-ray spectroscopy (EDS). Moreover, it has the unique capability to enable simultaneous heating and biasing experiments. Microsc. Res.

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Section: Resultsmentioning

confidence: 99%

A MEMS‐based heating holder for the direct imaging of simultaneous in‐situ heating and biasing experiments in scanning/transmission electron microscopes

Mele¹,

Konings²,

Dona³

et al. 2016

Microscopy Res & Technique

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“…The main method of structural analysis of nanocrystals is analytical high-resolution electron microscopy, which provides information on the structure, morphology, and chemical composition of the object of study at the atomic level [16][17][18]. In this work, we used JEM-4000EX (JEOL, Japan) and Titan 80-300 (FEI, USA) high-resolution electron microscopes.…”

Section: Methodsmentioning

confidence: 99%

Electron microscopic studies of CuS nanocrystals formed in Langmuir-Blodgett films

Гутаковский

Sveshnikova

Batsanov

et al. 2014

Optoelectron.Instrument.Proc.

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The morphology and structure of CuS crystals formed during sulfidation of copper behenate films obtained by the Langmuir-Blodgett (LB) method have been studied using high resolution electron microscopy. The average size of these crystals is about 3 nm and increases by a factor of approximately 2.2 after annealing at a temperature of 150 • C or above. Analysis of interplanar distances has shown that in the range of annealing temperatures of 150-200 • C, CuS nanocrystals have a P6 3/mmc hexagonal crystal lattice with parameters a = 0.38 nm and c = 1.64 nm. At annealing temperatures of 250 • C or above, the Cu2S crystalline phase begins to form, in addition to CuS nanocrystals. The proportion of this phase increases with increasing annealing temperature. Cu2S nanocrystals have a hexagonal crystal lattice type with the P6 3/mmc spatial group and unit cell parameters a = 0.39 nm and c = 0.68 nm. Quantitative evaluation of copper and sulfur in individual CuS and Cu2S nanocrystals was performed by local analysis of characteristic X-ray spectra.

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“…Ordinarily, the CM300FEG/UT has lens current and high-voltage power supplies that are stable to one part per million for a spread of focus of 36Å and an information limit of 1.07Å (Bakker et al, 1996). The OÅM-CM300FEG/UT uses improved power supplies with better stabilities to achieve beam energy spread of 0.85eV FWHH , spread of focus of 20Å, and information limit of 0.78Å (O'Keefe et al, 2001b).…”

Section: Sub-ångstrom Microscopymentioning

confidence: 99%

Sub-Ångstrom Atomic-Resolution Imaging from Heavy Atoms to Light Atoms

O’Keefe

Shao‐Horn

2004

Microsc Microanal

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John Cowley and his group at ASU pioneered the use of transmission electron microscopy (TEM) for high-resolution imaging. Three decades ago they achieved images showing the crystal unit cell content at better than 4Å resolution. Over the years, this achievement has inspired improvements in resolution that have enabled researchers to pinpoint the positions of heavy atom columns within the cell. More recently, this ability has been extended to light atoms as resolution has improved. Sub-Ångstrom resolution has enabled researchers to image the columns of light atoms (carbon, oxygen and nitrogen) that are present in many complex structures. By using sub-Ångstrom focal-series reconstruction of the specimen exit surface wave to image columns of cobalt, oxygen, and lithium atoms in a transition metal oxide structure commonly used as positive electrodes in lithium rechargeable batteries, we show that the range of detectable light atoms extends to lithium. HRTEM at sub-Ångstrom resolution will provide the essential role of experimental verification for the emergent nanotech revolution. Our results foreshadow those to be expected from next-generation TEMs with C S -corrected lenses and monochromated electron beams.

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Design and performance of an ultra-high-resolution 300 kV microscope

Cited by 18 publications

References 8 publications

A MEMS‐based heating holder for the direct imaging of simultaneous in‐situ heating and biasing experiments in scanning/transmission electron microscopes

A MEMS‐based heating holder for the direct imaging of simultaneous in‐situ heating and biasing experiments in scanning/transmission electron microscopes

Electron microscopic studies of CuS nanocrystals formed in Langmuir-Blodgett films

Sub-Ångstrom Atomic-Resolution Imaging from Heavy Atoms to Light Atoms

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