Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity

Hecquet, Christophe; Delmotte, Franck; Ravet‐Krill, Marie‐Françoise; Rossi, Sébastien de; Adnot, Jérôme; Bridou, Françoise; Varnière, Françoise; Meltchakov, Evgueni; Auchère, F.; Giglia, Angelo; Mahne, Nicola; Nanaronne, Stephano

doi:10.1007/s00339-009-5082-9

Cited by 22 publications

(18 citation statements)

References 28 publications

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“…Different Bragg orders of a periodic multilayer can be directly used to achieve this if the wavelengths of various emission lines match the different orders. 15 This concept was applied in a triple-band Mg/SiC multilayer by FernandezPerea et al: the first three Bragg peaks were optimized for 76.9 nm, 46.8 nm, and 33.1 nm light, respectively, as shown in Figure 1. 16 A stack of multilayers with different periods can be used to reflect at several wavelengths 17 or to further enhance the reflectance of each channel.…”

Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

“…This hybrid structure was demonstrated in the work of Hecquet et al to collect the emission lines from Fe and He in the range of 17.1-33.5 nm where the 1st order Bragg peak can be shifted by $5 nm. 15 For longer wavelengths, less bilayers are needed to reflect the light so that the top multilayer (optimized for the longer wavelength) can be reduced to a single layer. 19 A similar structure as described above can be used to further suppress the background radiation at other wavelengths.…”

Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

“…For instance, the buffer layer method can introduce extra reflectivity minima using the interference effects between the top and bottom stacks. 15 A different scheme based on enhanced absorption was developed by Suman et al 20 In this scheme, a capping layer structure consisting of absorbing and spacing layers was added on top of the multilayer. The high reflectance periodic ML generates a standing wave in the structure for both the target wavelength and the wavelength of the background radiation.…”

Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

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Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

Section: A Multi-channel Multilayer Mirrormentioning

confidence: 99%

See 1 more Smart Citation

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…Two types of thin-film filters (zirconium and magnesium) are held by a filter wheel located close to the 3k × 3k detector. The two types of filters isolate one of the two narrow bands reflected by the mirror's dual-band multilayer coating [6]. The support grids are nominally 70 lines per inch meshes with 81% geometrical transmission.…”

Section: B Simulationsmentioning

confidence: 99%

Minimization of the shadow patterns produced by periodic mesh grids in extreme ultraviolet telescopes

et al. 2010

Self Cite

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“…12 . The concept of imaging multiple wavelengths using a single multilayer coating 13,14 could significantly ease the cost, risk and complexity of future solar missions. For example, an existing practice towards the imaging of multiple wavelengths from a single telescope is to divide each telescope mirror in multiple sectors, with each sector tuned to one specific wavelength and coated separately using the appropriate material pair.…”

Section: Introductionmentioning

confidence: 99%

Corrosion-resistant high-reflectance Mg/SiC multilayer coatings for solar physics in the 25-80 nm wavelength region

et al. 2012

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The corrosion mechanisms in Mg/SiC multilayers have been elucidated and corrosion-resistant Mg/SiC multilayer coatings have been demonstrated using spontaneously intermixed Al-Mg corrosion barrier layers. The corrosion-resistant Mg/SiC multilayers can achieve high reflectance simultaneously in up to three narrow wavelength bands within the 25-80 nm wavelength region, making them attractive candidates for solar physics instrumentation and for other applications.

show abstract

Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity

Cited by 22 publications

References 28 publications

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Minimization of the shadow patterns produced by periodic mesh grids in extreme ultraviolet telescopes

Corrosion-resistant high-reflectance Mg/SiC multilayer coatings for solar physics in the 25-80 nm wavelength region

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