Design and PID Control of Piezoelectric Micro-motion Stage

Sun, Feng; Qi, Shengfei; Bao, Junshan; Xu, Fangchao; Zhao, Wei

doi:10.1109/iisr.2018.8535672

Cited by 1 publication

(2 citation statements)

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“…The second approach involves selecting and integrating an appropriate hysteresis model in the controller design, which can accurately depict the hysteresis behavior of the piezoelectric actuator [175]. As a feedback controller, the PID controller (proportional integral derivative controller) is suitable for piezoelectric actuators and is utilized extensively in commercial control applications in the form of integral controllers, proportional-integral controllers, and proportional integral derivative controllers [176,177]. Since the feedback control without hysteresis model considers hysteresis nonlinearity as disturbances, modified PID controllers As a feedback controller, the PID controller (proportional integral derivative controller) is suitable for piezoelectric actuators and is utilized extensively in commercial control applications in the form of integral controllers, proportional-integral controllers, and proportional integral derivative controllers [176,177].…”

Section: Feedback Control Of Piezoelectric Actuatorsmentioning

confidence: 99%

“…As a feedback controller, the PID controller (proportional integral derivative controller) is suitable for piezoelectric actuators and is utilized extensively in commercial control applications in the form of integral controllers, proportional-integral controllers, and proportional integral derivative controllers [176,177]. Since the feedback control without hysteresis model considers hysteresis nonlinearity as disturbances, modified PID controllers As a feedback controller, the PID controller (proportional integral derivative controller) is suitable for piezoelectric actuators and is utilized extensively in commercial control applications in the form of integral controllers, proportional-integral controllers, and proportional integral derivative controllers [176,177]. Since the feedback control without hysteresis model considers hysteresis nonlinearity as disturbances, modified PID controllers such as adaptive PID controllers [178], Self-tuning PID controllers [179], disturbance observer-based PID controllers [180] and nonlinear PID controllers with extended state observer [181] have been proposed for performance enhancement.…”

Section: Feedback Control Of Piezoelectric Actuatorsmentioning

confidence: 99%

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Application of Modeling and Control Approaches of Piezoelectric Actuators: A Review

Kanchan,

Santhya,

Bhat

et al. 2023

Technologies

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Piezoelectric actuators find extensive application in delivering precision motion in the micrometer to nanometer range. The advantages of a broader range of motion, rapid response, higher stiffness, and large actuation force from piezoelectric actuators make them suitable for precision positioning applications. However, the inherent nonlinearity in the piezoelectric actuators under dynamic working conditions severely affects the accuracy of the generated motion. The nonlinearity in the piezoelectric actuators arises from hysteresis, creep, and vibration, which affect the performance of the piezoelectric actuator. Thus, there is a need for appropriate modeling and control approaches for piezoelectric actuators, which can model the nonlinearity phenomenon and provide adequate compensation to achieve higher motion accuracy. The present review covers different methods adopted for overcoming the nonlinearity issues in piezoelectric actuators. This review highlights the charge-based and voltage-based control methods that drive the piezoelectric actuators. The survey also includes different modeling approaches for the creep and hysteresis phenomenon of the piezoelectric actuators. In addition, the present review also highlights different control strategies and their applications in various types of piezoelectric actuators. An attempt is also made to compare the piezoelectric actuator’s different modeling and control approaches and highlight prospects.

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