Design and realization of 3D printed fiber-tip microcantilever probes applied to hydrogen sensing

Liao, Changrui; Cong, Xin; Zhao, Jinlai; Zou, Mengqiang; Zhao, Yuanyuan; Li, Bozhe; Ji, Peng; Cai, Zewei; Gan, Zongsong; Wang, Ying; Wang, Yiping

doi:10.37188/lam.2022.005

Cited by 39 publications

(20 citation statements)

References 46 publications

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“…In this work, we chose a comparably straightforward design of accelerometer cantilevers with a squared cross-section to show the simplicity and ease of use of this new manufacturing approach. However, the 3D printing capabilities of two-photon polymerization allow more advanced sensor designs, such as those with varying cross-sections 26 or cellular microarchitectures 27 , which will have a significant impact on the device performance and functionality and will ultimately result in new and improved MEMS devices.…”

Section: Discussionmentioning

confidence: 99%

Micro 3D printing of a functional MEMS accelerometer

et al. 2022

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Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconductor manufacturing techniques. However, these techniques are not viable for the cost-efficient manufacturing of specialized MEMS devices at low- and medium-scale volumes. Thus, applications that require custom-designed MEMS devices for markets with low- and medium-scale volumes of below 5000–10,000 components per year are extremely difficult to address efficiently. The 3D printing of MEMS devices could enable the efficient realization and production of MEMS devices at these low- and medium-scale volumes. However, current micro-3D printing technologies have limited capabilities for printing functional MEMS. Herein, we demonstrate a functional 3D-printed MEMS accelerometer using 3D printing by two-photon polymerization in combination with the deposition of a strain gauge transducer by metal evaporation. We characterized the responsivity, resonance frequency, and stability over time of the MEMS accelerometer. Our results demonstrate that the 3D printing of functional MEMS is a viable approach that could enable the efficient realization of a variety of custom-designed MEMS devices, addressing new application areas that are difficult or impossible to address using conventional MEMS manufacturing.

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Section: Discussionmentioning

confidence: 99%

Micro 3D printing of a functional MEMS accelerometer

et al. 2022

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“…Optical fiber sensing is widely used in biomedical, aerospace, material analysis, environmental protection and many other civil and military fields because of its high sensitivity, wide application area, strong anti-interference capability, and real-time detection. So many advantages have led to a wave of research on optical fiber sensing, including the idea of bending, side-throwing, and coating optical fibers, [1][2][3][4] the application of microcantilever probes at the tip of optical fibers, 5 optical fiber gratings with periodically arranged microstructures inside optical fibers, 6 the introduction of periodically arranged patterned gold 7 or graphene with voltage-modulated dielectric constants 8 and the use of photonic crystal fibers (PCFs) for absorption-type gas sensors 9 or physical field sensors filled with liquids or liquid crystals incorporating surface plasmon resonance (SPR). 10 Various methods for modifying optical fibers have been of great importance for the development of sensors, especially devices combining photonic crystal fibers with the SPR effect, which ensure structural stability and at the same time greatly improve sensing sensitivity.…”

Section: Introductionmentioning

confidence: 99%

High confidence plasmonic sensor based on photonic crystal fibers with a U-shaped detection channel

Zhu

et al. 2023

Phys. Chem. Chem. Phys.

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“…Magnetic sensors are widely used in power systems, , magnetic navigation, space science, controllable nuclear fusion, mineral exploration, medical diagnosis, − and other fields. , With the “Lab on Fiber” technology developing further, optical fiber sensors have been widely applied in magnetic sensing , due to their immunity to electromagnetic interference, miniaturized structure, high sensitivity, quick response, and the potential for remote sensing . The optical fiber end facets are inherently extensible platforms for multifarious micro- and nano-optical sensing structures. − Femtosecond (Fs) laser-induced two-photon polymerization (TPP) is a three-dimensional (3D) printing technology with nanometer resolution, widely used to print polymer micro- and nanostructures of an arbitrary shape. ,− With the advantages of high integration and short response time, the fiber-tip polymer microcantilever sensors have been widely used for highly sensitive measurement of microforce, , hydrogen, , organic solvent, and microfluid . After being functionalized with magnetically responsive materials, the fiber-tip polymer microcantilever is expected as a highly sensitive magnetic sensor.…”

Section: Introductionmentioning

confidence: 99%

Four-Dimensional Printing of a Fiber-Tip Multimaterial Microcantilever as a Magnetic Field Sensor

et al. 2023

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Metrics & MoreArticle Recommendations * sı Supporting Information ABSTRACT: "Lab on Fiber" technology integrates different micro-and nanoscale structures or materials onto optical fibers to create additional functionality. With the advanced femtosecond (Fs) laser-induced two-photon polymerization (TPP) technology, polymer microstructures printed on a fiber tip have great potential as micro-optical sensors. However, additional functionalization is usually required, which is costly and complex. Based on the advanced four-dimensional (4D) printing theory, for the first time, a successive multimaterial on-fiber TPP strategy is proposed here, and a fiber-tip polymer microcantilever-based magnetic sensor is prepared in one step. First, the cantilever and the supporting base on the fiber tip are printed by TPP, and then the magnetically responsive cube on the cantilever tip is printed with a self-made magnetic fluid photoresist. The whole process is completed in one step without additional treatment. The prepared sensor shows a minuscule size and a high magnetic sensitivity of 119 pm mT −1 in the range of 0−90 mT, suitable for weak or microspace magnetic field measurement at high spatial resolution. Especially, the proposed 4D successive on-fiber TPP strategy can be extended to other stimulus-responsive materials, providing new guidance for manufacturing various stimulus-responsive microsensors and microactuators on the fiber tip.

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Design and realization of 3D printed fiber-tip microcantilever probes applied to hydrogen sensing

Cited by 39 publications

References 46 publications

Micro 3D printing of a functional MEMS accelerometer

Micro 3D printing of a functional MEMS accelerometer

High confidence plasmonic sensor based on photonic crystal fibers with a U-shaped detection channel

Four-Dimensional Printing of a Fiber-Tip Multimaterial Microcantilever as a Magnetic Field Sensor

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