Design and simulation analysis of an integrated <i>xyz</i> micro-actuator for controlling displacement of a scanning probe

Archive of Mechanical Engineering

“…2b is a different spring type similar to Fig. 2a, the serpentine springs in this case are not axial symmetry such as Type B, which has rotational symmetry, this spring is called the Type C. The two springs, Type B and Type C, are similar to that reported previously [12][13][14]. Therefore, the advantage of the coupling effect in the proposed spring is also preserved in comparison with springs without coupling.…”

“…The mechanical spring is a key element in various micro-electro-mechanical systems (MEMS) devices such as micro-actuators, inertial switches, accelerometers, and so on [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. In these devices, mechanical springs are designed for single or multi-axis motion.…”

“…In these devices, mechanical springs are designed for single or multi-axis motion. Up to date, there are many types of springs introduced for applications in controlling in-plane motions [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. The springs can be designed for compliance to the linear movements in 𝑥 and 𝑦 axes [1-4, 7, 9, 12].…”

“…For out-of-plane 𝑧-axis motion, the straight beam springs have been employed, however, their displacement range is limited [1,23,24]. To extend the out-of-plane movement range in micro-actuators while minimizing the device area, serpentine beam and spiral springs have been introduced [12][13][14]. In the design of micro-actuators, the stiffness of suspending springs needs to be determined for evaluating the operational frequency range as well as their actuation voltage [1-4, 11-13, 18].…”