Design and Simulation of a Self-Test Technique for High Frequency MEMS Actuators

Mohammed, Ali Jasim; Al-Gayem, Qais

doi:10.1109/aest55805.2022.10412902

2022 2nd International Conference on Advances in Engineering Science and Technology (AEST) 2022

DOI: 10.1109/aest55805.2022.10412902

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Design and Simulation of a Self-Test Technique for High Frequency MEMS Actuators

Ali Jasim Mohammed,

Qais Al-Gayem

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Design and Simulation of a Self-Test Technique for High Frequency MEMS Actuators

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