Design and Simulation of an Integrated Micro-Hotplate for Gas Sensing Applications

Nemecek, A.; Siegele, Martin; Gamauf, Christoph; Teva, J.; Kraft, Jonas Eriksson; Schrank, Franz; Noll, Heinrich

doi:10.3850/978-981-07-3353-7_279

Proceedings of the 9th International Conference on Multi-Material Micro Manufacture 2012

DOI: 10.3850/978-981-07-3353-7_279

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Design and Simulation of an Integrated Micro-Hotplate for Gas Sensing Applications

A. Nemecek¹,

Martin Siegele²,

Christoph Gamauf³

et al.

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Design and Simulation of an Integrated Micro-Hotplate for Gas Sensing Applications

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